A geometric etch-stop technology for bulk micromachining

Journal of Micromechanics and Microengineering

Volumn 11, Issue 3, 2001, Pages 277-282

  Parviz, Babak Amir ^a,b   Najafi, Khalil ^b  

^a Nanovation Technologies   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CRYSTALLINE MATERIALS; DRY ETCHING; LITHOGRAPHY; SILICON;

SINGLE-CRYSTALLINE SILICON STRUCTURES; WET ANISOTROPIC ETCHING;

MICROMACHINING;

EID: 0035335917     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/11/3/318     Document Type: Article

References (13)

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