Strong-axis bending mode vibrations for resonant microcantilever (bio)chemical sensors in gas or liquid phase

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn , Issue , 2005, Pages 193-199

  Dufour, Isabelle ^a   Heinrich, Stephen M ^b   Josse, Fabien ^b  

^a UNIVERSITÉ BORDEAUX 1   (France)

^b Marquette University   (United States)

Author keywords

Liquid environment; Microcantilever sensors; Quality factor effect; Resonant frequency

Indexed keywords

COATING TECHNIQUES; DAMPING; NATURAL FREQUENCIES; VIBRATIONS (MECHANICAL); VISCOELASTICITY;

MICROCANTILEVER SENSORS; QUALITY FACTOR EFFECT;

CHEMICAL SENSORS;

EID: 28744450956     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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