Study of the origin of bending induced by bimetallic effect on microcantilever

Sensors

Volumn 7, Issue 9, 2007, Pages 1757-1765

  Ramos, Daniel ^a   Mertens, Johann ^a   Calleja, Montserrat ^a   Tamayo, Javier ^a  

^a ISAAC NEWTON GROUP OF TELESCOPES   (Spain)

Author keywords

Axial force; Cantilever; Profile; Stoney's equation; Strain; Stress; Temperature

Indexed keywords

ANALYTICAL MODELS; STRAIN; STRESSES; TEMPERATURE;

AXIAL FORCES; BI-MATERIAL CANTILEVER; BIMETALLIC EFFECTS; CANTILEVER; PROFILE; STONEY'S EQUATION; TEMPERATURE CHANGES; THERMAL DEPENDENCES;

NANOCANTILEVERS;

EID: 34948897545     PISSN: 14243210     EISSN: 14248220     Source Type: Journal    
DOI: 10.3390/s7091757     Document Type: Article

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