Surface chemistry of precursors for film growth: pentakisdimethylamido tantalum

Applied Surface Science

Volumn 143, Issue 1, 1999, Pages 142-152

  Sloan, D W ^a   Blass, P M ^a   White, J M ^a  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; CHEMICAL BONDS; DIFFUSION; ELECTRON DIFFRACTION; FILM GROWTH; MOLECULAR STRUCTURE; NICKEL; PHOTOELECTRON SPECTROSCOPY; TANTALUM COMPOUNDS; TEMPERATURE PROGRAMMED DESORPTION; THIN FILMS; ULTRAVIOLET SPECTROSCOPY;

PENTAKISDIMETHYLAMIDO TANTALUM; ULTRAVIOLET PHOTOELECTRON SPECTROSCOPY;

SURFACE CHEMISTRY;

EID: 0032625950     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00777-6     Document Type: Article

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