Industrial applications of Atomic Layer Deposition

ECS Transactions

Volumn 25, Issue 8 PART 2, 2009, Pages 641-652

  Ritala, Mikko ^a   Niinistö, Jaakko ^a  

^a UNIVERSITY OF HELSINKI   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

APPLICATION AREA; INDUSTRIAL USE; MAGNETIC RECORDING HEADS; POTENTIAL APPLICATIONS; SEMICONDUCTOR INDUSTRY; THIN-FILM ELECTROLUMINESCENT; THIN-FILM TECHNOLOGY;

INDUSTRIAL APPLICATIONS; MAGNETIC HEADS; MAGNETIC RECORDING; PROTECTIVE COATINGS; SEMICONDUCTOR DEVICE MANUFACTURE; THIN FILM DEVICES; THIN FILMS;

CHEMICAL VAPOR DEPOSITION;

EID: 76549091893     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3207651     Document Type: Conference Paper

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