Challenges in process integration of catalytic DC plasma synthesis of vertically aligned carbon nanofibres

Journal of Physics D: Applied Physics

Volumn 44, Issue 17, 2011, Pages

  Melechko, Anatoli V ^a   Pearce, Ryan C ^a   Hensley, Dale K ^b   Simpson, Michael L ^b   McKnight, Timothy E ^b  

^a North Carolina State University   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMISTIC PROCESS; CARBON NANOFIBRES; CATALYST NANOPARTICLE; CATALYTIC SYNTHESIS; DC BIAS; DC DISCHARGES; DC PLASMA; DEVICE FABRICATIONS; ELECTRICAL CONDUCTIVITY; ELECTROCHEMICAL PROBE; ELECTRON FIELD EMISSION; FILM DEPOSITION; FUNCTIONAL ELEMENTS; GENE DELIVERY; HIGH ASPECT RATIO STRUCTURES; HIGH TEMPERATURE; IN-PROCESS; LARGE ARRAYS; NANO SCALE; NANOFIBRES; NEURAL INTERFACES; NON-CATALYTIC; NONUNIFORMITY; PLASMA INSTABILITIES; PLASMA PROCESS; SCANNING PROBES; SUBSTRATE ETCHING; SUBSTRATE MATERIAL; SYNTHESIS PROCESS; VERTICALLY ALIGNED;

ASPECT RATIO; CARBON FILMS; CARBON NANOFIBERS; ELECTRIC CONDUCTIVITY; ELECTRIC DISCHARGES; ELECTROMAGNETIC FIELDS; FIELD EMISSION; FILM GROWTH; GENE THERAPY; GENE TRANSFER; PLASMA DEPOSITION; PLASMA DIAGNOSTICS; PLASMAS; PROBES; SUBSTRATES;

PROCESS CONTROL;

EID: 79954570411     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/44/17/174008     Document Type: Article

References (89)

1. Dresselhaus M S 2001 Carbon: bonding Encyclopedia of Materials: Science and Thechnology (Amsterdam: Elsevier Science)
2. Kroto H W, Heath J R, Obrien S C, Curl R F and Smalley R E 1985 Nature 318 162-3
3. Iijima S 1991 Nature 354 56-8
4. Baker R T K 1989 Carbon 27 315-23
5. Geim A K and Novoselov K S 2007 Nature Mater. 6 183-91
6. Ren Z F, Huang Z P, Xu J W, Wang J H, Bush P, Siegal M P and Provencio P N 1998 Science 282 1105-07
7. Merkulov V I, Lowndes D H, Wei Y Y, Eres G and Voelkl E 2000 Appl. Phys. Lett. 76 3555-7
8. Ren Z F, Huang Z P, Wang D Z, Wen J G, Xu J W, Wang J H, Calvet L E, Chen J, Klemic J F and Reed M A 1999 Appl. Phys. Lett. 75 1086-8
9. Merkulov V I, Melechko A V, Guillorn M A, Lowndes D H and Simpson M L 2001 Appl. Phys. Lett. 79 2970-2
10. Fan S S, Chapline M G, Franklin N R, Tombler T W, Cassell A M and Dai H J 1999 Science 283 512-4
11. Melechko A V, Merkulov V I, McKnight T E, Guillorn M A, Klein K L, Lowndes D H and Simpson M L 2005 J. Appl. Phys. 97 041301
12. Landis E C, Klein K L, Liao A, Pop E, Hensley D K, Melechko A V and Hamers R J 2010 Chem. Mater. 22 2357-66
13. Becker J, Grun G, Seemann R, Mantz H, Jacobs K, Mecke K R and Blossey R 2003 Nature Mater. 2 59-63
14. Bischof J, Scherer D, Herminghaus S and Leiderer P 1996 Phys. Rev. Lett. 77 1536-9
15. Giermann A L and Thompson C V 2005 Appl. Phys. Lett. 86 121903
16. Herminghaus S, Jacobs K, Mecke K, Bischof J, Fery A, Ibn-Elhaj M and Schlagowski S 1998 Science 282 916-9
17. Melechko A V, Klein K L, Fowlkes J D, Hensley D K, Merkulov I A, McKnight T E, Rack P D, Horton J A and Simpson M L 2007 J. Appl. Phys. 102 074314-7
18. Murray C B, Kagan C R and Bawendi M G 2000 Annu. Rev. Mater. Science 30 545-610
19. Puntes V F, Krishnan K M and Alivisatos A P 2001 Science 291 2115-7
20. Dong L, Jiao J, Pan C and Tuggle D W 2004 Appl. Phys. A 78 9-14
21. Cui H T, Yang X J, Simpson M L, Lowndes D H and Varela M 2004 Appl. Phys. Lett. 84 4077-9
22. Hofmann S, Ducati C, Robertson J and Kleinsorge B 2003 Appl. Phys. Lett. 83 135-7
23. Hofmann S, Kleinsorge B, Ducati C, Ferrari A C and Robertson J 2004 Diamond Relat. Mater. 13 1171-6
24. Hofmann S, Kleinsorge B, Ducati C and Robertson J 2003 New J. Phys. 5 153
25. Boskovic B O, Golovko V B, Cantoro M, Kleinsorge B, Chuang A T H, Ducati C, Hofmann S, Robertson J and Johnson B F G 2005 Carbon 43 2643-8
26. Klein K L, Melechko A V, McKnight T E, Retterer S T, Rack P D, Fowlkes J D, Joy D C and Simpson M L 2008 J. Appl. Phys. 103 061301
27. Tan E P S, Goh C N, Sow C H and Lim C T 2005 Appl. Phys. Lett. 86 073115
28. Tan E P S and Lim C T 2006 Compos. Sci. Technol. 66 1102-11
29. Qi H J, Teo K B K, Lau K K S, Boyce M C, Milne W I, Robertson J and Gleason K K 2003 J. Mech. Phys. Solids 51 2213-37
30. Guillorn M A, Melechko A V, Merkulov V I, Ellis E D, Britton C L, Simpson M L, Lowndes D H and Baylor L R 2001 Appl. Phys. Lett. 79 3506-8
31. Guillorn M A, Melechko A V, Merkulov V I, Ellis E D, Simpson M L, Baylor L R and Bordonaro G J 2001 J. Vac. Sci. Technol. B 19 (6) 2598-601
32. Guillorn M A, Melechko A V, Merkulov V I, Hensley D K, Simpson M L and Lowndes D H 2002 Appl. Phys. Lett. 81 3660-2
33. Guillorn M A, Simpson M L, Bordonaro G J, Merkulov V I, Baylor L R and Lowndes D H 2001 J. Vac. Sci. Technol. B 19 573-8
34. Guillorn M A, Yang X, Melechko A V, Hensley D K, Hale M D, Merkulov V I, Simpson M L, Baylor L R, Gardner W L and Lowndes D H 2004 J. Vac. Sci. Technol. B 22 35-9
35. McKnight T E, Melechko A V, Austin D W, Sims T, Guillorn M A and Simpson M L 2004 J. Phys. Chem. B 108 7115-25
36. McKnight T E, Melechko A V, Griffin G D, Guillorn M A, Merkulov V I, Serna F, Hensley D K, Doktycz M J, Lowndes D H and Simpson M L 2003 Nanotechnology 14 551-6
37. McKnight T E, Melechko A V, Fletcher B L, Jones S W, Hensley D K, Peckys D B, Griffin G D, Simpson M L and Ericson M N 2006 J. Phys. Chem. B 110 15317-27
38. Yu Z, McKnight T E, Ericson M N, Melechko A V, Simpson M L and Morrison B 2007 Nano Lett. 7 2188-95
39. McKnight T E, Melechko A V, Griffin G D and Simpson M L 2006 In Vitro Cell. Dev. Biol.-Animal 42 17a-17a
40. McKnight T E, Melechko A V, Hensley D K, Mann D G J, Griffin G D and Simpson M L 2004 Nano Lett. 4 1213-9
41. Baylor L R, Lowndes D H, Simpson M L, Thomas C E, Guillorn M A, Merkulov V I, Whealton J H, Ellis E D, Hensley D K and Melechko A V 2002 J. Vac. Sci. Technol. B 20 2646-50
42. Dhindsa M S, Smith N R, Heikenfeld J, Rack P D, Fowlkes J D, Doktycz M J, Melechko A V and Simpson M L 2006 Langmuir 22 9030-4
43. Fletcher B L, McKnight T E, Fowlkes J D, Allison D P, Simpson M L and Doktycz M J 2007 Synth. Met. 157 282-9
44. Fletcher B L, Hullander E D, Melechko A V, McKnight T E, Klein K L, Hensley D K, Morrell J L, Simpson M L and Doktycz M J 2004 Nano Lett. 4 1809-14
45. Zhang L, Melechko A V, Merkulov V I, Guillorn M A, Simpson M L, Lowndes D H and Doktycz M J 2002 Appl. Phys. Lett. 81 135-7
46. Baker S E, Tse K Y, Hindin E, Nichols B M, Clare T L and Hamers R J 2005 Chem. Mater. 17 4971-8
47. Baker S E, Tse K Y, Lee C S and Hamers R J 2006 Diamond Relat. Mater. 15 433-9
48. Li J, Ng H T, Cassell A, Fan W, Chen H, Ye Q, Koehne J, Han J and Meyyappan M 2003 Nano Lett. 3 597-602
49. Baker S E, Colavita P E, Tse K Y and Hamers R J 2006 Chem. Mater. 18 4415-22
50. Mann D G J, McKnight T E, Melechko A V, Simpson M L and Sayler G S 2007 Biotechnol. Bioeng. 97 680-8
51. Melechko A V, McKnight T E, Hensley D K, Guillorn M A, Borisevich A Y, Merkulov V I, Lowndes D H and Simpson M L 2003 Nanotechnology 14 1029-35
52. Guillorn M A, McKnight T E, Melechko A, Merkulov V I, Britt P F, Austin D W, Lowndes D H and Simpson M L 2002 J. Appl. Phys. 91 3824-8
53. McKnight T E, Melechko A V, Guillorn M A, Merkulov V I, Doktycz M J, Culbertson C T, Jacobson S C, Lowndes D H and Simpson M L 2003 J. Phys. Chem. B 107 10722-8
54. Nguyen-Vu T D B, Chen H, Cassell A M, Andrews R J, Meyyappan M and Li J 2007 IEEE Trans. Biomed. Eng. 54 1121-8
55. Cui H, Kalinin S V, Yang X and Lowndes D H 2004 Nano Lett. 4 2157-61
56. Ye Q, Cassell A, Liu H, Chao K-J, Han J and Meyyappan M 2004 Nano Lett. 4 1301
57. Chhowalla M, Teo K B K, Ducati C, Rupesinghe N L, Amaratunga G A J, Ferrari A C, Roy D, Robertson J and Milne W I 2001 J. Appl. Phys. 90 5308-17
58. Fowlkes J D, Melechko A V, Klein K L, Rack P D, Smith D A, Hensley D K, Doktycz M J and Simpson M L 2006 Carbon 44 1503-10
59. Teo K B K, Chhowalla M, Amaratunga G A J, Milne W I, Pirio G, Legagneux P, Wyczisk F, Olivier J and Pribat D 2002 J. Vac. Sci. Technol. B 20 116-21
60. Teo K B K, Hash D B, Lacerda R G, Rupesinghe N L, Bell M S, Dalal S H, Bose D, Govindan T R, Cruden B A, Chhowalla M, Amaratunga G A J, Meyyappan J M and Milne W I 2004 Nano Lett. 4 921-6
61. Denysenko I and Ostrikov K 2009 J. Phys. D: Appl. Phys. 42 015208
62. Fletcher B L, McKnight T E, Melechko A V, Hensley D K, Thomas D K, Ericson M N and Simpson M L 2006 Adv. Mater. 18 1689-94
63. Boskovic B O, Stolojan V, Khan R U A, Haq S and Silva S R P 2002 Nature Mater. 1 165-8
64. Hofmann S, Ducati C, Kleinsorge B and Robertson J 2003 Appl. Phys. Lett. 83 4661-3
65. Arumugam P U, Chen H, Siddiqui S, Weinrich J A P, Jejelowo A, Li J and Meyyappan M 2009 Biosensors Bioelectron. 24 2818-24
66. Siddiqui S, Arumugam P U, Chen H, Li J and Meyyappan M 2010 ACS Nano 4 955-61
67. Koehne J E, Chen H, Cassell A M, Ye Q, Han J, Meyyappan M and Li J 2004 Clin. Chem. 50 1886-93
68. Cassell A M, Li J, Stevens R M D, Koehne J E, Delzeit L, Ng H T, Ye Q, Han J and Meyyappan M 2004 Appl. Phys. Lett. 85 2364-6
69. de Asis E, Nguyen-Vu T, Arumugam P, Chen H, Cassell A, Andrews R, Yang C and Li J 2009 Biomed. Microdevices 11 801-8
70. Caughman J B O, Baylor L R, Guillorn M A, Merkulov V I, Lowndes D H and Allard L F 2003 Appl. Phys. Lett. 83 1207-9
71. Merkulov V I, Melechko A V, Guillorn M A, Lowndes D H and Simpson M L 2001 Chem.l Phys. Lett. 350 381-5
72. Merkulov V, Melechko A V, Guillorn M A, Lowndes D H and Simpson M L 2002 Chem. Phys. Lett. 361 492-8
73. Hirata T, Satake N, Jeong G H, Kato T, Hatakeyama R, Motomiya K and Tohji K 2003 Appl. Phys. Lett. 83 1119-21
74. Ikuno T, Furuta H, Yamamoto T, Takahashi S, Kamizono M, Honda S, Katayama M, Hirao T and Oura K 2003 Surf. Interface Anal. 35 15-18
75. Merkulov V I, Hensley D K, Melechko A V, Guillorn M A, Lowndes D H and Simpson M L 2002 J. Phys. Chem. B 106 10570-7
76. Merkulov V I, Guillorn M A, Lowndes D H, Simpson M L and Voelkl E 2001 Appl. Phys. Lett. 79 1178-80
77. Merkulov V I, Melechko A V, Guillorn M A, Lowndes D H and Simpson M L 2002 Appl. Phys. Lett. 80 476-8
78. Teo K B K, Chhowalla M, Amaratunga G A J, Milne W I, Hasko D G, Pirio G, Legagneux P, Wyczisk F and Pribat D 2001 Appl. Phys. Lett. 79 1534-6
79. Yang X J, Guillorn M A, Austin D, Melechko A V, Cui H T, Meyer H M, Merkulov V I, Caughman J B O, Lowndes D H and Simpson M L 2003 Nano Lett. 3 1751-5
80. Cui H, Yang X, Meyer H M, Baylor L R, Simpson M L, Gardner W L, Lowndes D H, An L and Lui J 2005 J. Mater. Res. 20 850-55
81. Klein K L, Melechko A V, Rack P D, Fowlkes J D, Meyer H M and Simpson M L 2005 Carbon 43 1857-63
82. Merkulov V I, Melechko A V, Guillorn M A, Simpson M L, Lowndes D H, Whealton J H and Raridon R J 2002 Appl. Phys. Lett. 80 4816-8
83. Helveg S, Lopez-Cartes C, Sehested J, Hansen P L, Clausen B S, Rostrup-Nielsen J R, Abild-Pedersen F and Norskov J K 2004 Nature 427 426-9
84. Vasenkov A V 2008 J. Comput. Theor. Nanosci. 5 48-55
85. Moser J, Panepucci R, Huang Z P, Li W Z, Ren Z F, Usheva A and Naughton M J 2003 J. Vac. Sci. Technol. B 21 1004-7
86. Guillorn M A, Ilic B, Melechko A V, Merkulov V I, Lowndes D H and Simpson M L 2003 US2005103993-A1; US7151256-B2, Cantilever structure e.g. chemical force microscope tip, fabricating method for use in scanning probe microscope, involves transferring outline of relieved volume from mask layer into substrate to remove volume from substrate, US2005103993-A1 US716770 19 Nov 2003
87. Retterer S T, Melechko A, Hensley D K, Simpson M L and Doktycz M J 2008 Carbon 46 1378-83
88. Klein K L, Melechko A V, Fowlkes J D, Rack P D, Hensley D K, Meyer H M, Allard L F, McKnight T E and Simpson M L 2006 J. Phys. Chem. B 110 4766-71
89. Ye Q, Cassell A, Liu H, Chao K-J, Han J and Meyyappan M 2004 Nano Lett. 1301-8