Fabrication of gated cathode structures using an in situ grown vertically aligned carbon nanofiber as a field emission element

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 2, 2001, Pages 573-578

  Guillorn, M A ^a,b   Simpson, M L ^a,b   Bordonaro, G J ^c   Merkulov, V I ^b   Baylor, L R ^b   Lowndes, D H ^b  

^a UNIVERSITY OF TENNESSEE   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

^c Department of Theoretical and Applied Mechanics and the Cornell Nanofabrication Facility   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSTS; CATHODES; ELECTRON BEAM LITHOGRAPHY; ELECTRON EMISSION; ELECTROSTATICS; GROWTH (MATERIALS); METALLIZING; NANOTECHNOLOGY; PHOTOLITHOGRAPHY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REACTIVE ION ETCHING; THERMAL EFFECTS;

ELECTROSTATIC GATING STRUCTURE; FIELD EMISSION ELEMENT; GATED CATHODE STRUCTURES; VERTICALLY ALIGNED CARBON NANOFIBERS;

CARBON FIBERS;

EID: 0035271392     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1358855     Document Type: Article

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