Pull-in characterization of doubly-clamped composite beams

Sensors and Actuators, A: Physical

Volumn 151, Issue 2, 2009, Pages 118-126

  Nie, Meng ^a   Huang, Qing An ^a   Li, Weihua ^a  

^a BEIJING UNIVERSITY OF POSTS AND TELECOMMUNICATIONS   (China)

Author keywords

Doubly clamped composite beam; Material properties; Pull in; Residual stress

Indexed keywords

ANALYTICAL MODELS; CLAMPED BEAMS; DOUBLY-CLAMPED COMPOSITE BEAM; FEM SIMULATIONS; FIXED-FIXED BEAMS; IMPROVED MODELS; IN-SITU METHODS; MATERIAL PROPERTIES; MEMS DEVICES; MICROMACHINED BEAMS; PULL-IN; PULL-IN VOLTAGES; TEST STRUCTURES; YOUNG'S MODULUS;

COMPOSITE BEAMS AND GIRDERS; ELECTROSTATICS; EXTRACTION; MATERIALS; RESIDUAL STRESSES; STRENGTH OF MATERIALS;

COMPOSITE FILMS;

EID: 64549159716     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.02.027     Document Type: Article

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