A low actuation voltage electrostatic actuator for RF MEMS switch applications

Journal of Micromechanics and Microengineering

Volumn 17, Issue 8, 2007, Pages 1649-1656

  Chu, Chia Hua ^a   Shih, Wen Pin ^b   Chung, Sheng Yuan ^a   Tsai, Hsin Chang ^c   Shing, Tai Kang ^c   Chang, Pei Zen ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^c DELTA ELECTRONICS INC   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BUCKLING; ELECTRIC SWITCHES; MEMS; NUMERICAL METHODS; RESIDUAL STRESSES; SURFACE MICROMACHINING; VOLTAGE CONTROL;

ACTUATION VOLTAGE; MEMS SWITCHES; SIGNAL FREQUENCY;

ELECTROSTATIC ACTUATORS;

EID: 34547657513     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/8/031     Document Type: Article

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