A novel semi-analytical approach for micro beams subjected to electrostatic loads and residual stress gradients

Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009

Volumn 6, Issue , 2010, Pages 597-606

  Ou, Kuang Shun ^a   Chen, Kuo Shen ^a   Yang, Tian Shiang ^a   Lee, Sen Yung ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Electrostatic load; Energy method; Finite element method; Micro cantilever beams; Residual stress gradient

Indexed keywords

BEAM STRUCTURES; ELECTROSTATIC LOAD; ENERGY METHOD; MEMS SENSORS; MICRO BEAMS; MICROCANTILEVER BEAMS; PARAMETRIC STUDY; PROCESSING PARAMETERS; PULL-IN; RESIDUAL STRESS GRADIENTS; SEMI-ANALYTICAL; SENSORS AND ACTUATORS; SHAPE FUNCTIONS;

ACTUATORS; ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; DESIGN; ELECTRIC FURNACES; ELECTROSTATIC ACTUATORS; ELECTROSTATIC FORCE; FUNCTION EVALUATION; NANOCANTILEVERS; RESIDUAL STRESSES; SENSORS;

FINITE ELEMENT METHOD;

EID: 77953794486     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/DETC2009-86977     Document Type: Conference Paper

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