Pull-in analysis of torsional scanners actuated by electrostatic vertical combdrives

Journal of Microelectromechanical Systems

Volumn 17, Issue 5, 2008, Pages 1228-1238

  Lee, Daesung ^a   Solgaard, Olav ^b  

^a LG Electronics Inc   (South Korea)

^b Stanford University   (United States)

Author keywords

2 DOF; Electrostatic actuation; In plane twist; MEMS scanner; Pull in; Vertical combdrive

Indexed keywords

ASPECT RATIO; CAPACITANCE; DEFLECTION (STRUCTURES); ELECTRIC POTENTIAL; ELECTROSTATICS; EQUATIONS OF MOTION; FAILURE ANALYSIS; GALLIUM ALLOYS; REACTIVE ION ETCHING; RELIABILITY ANALYSIS; VOLTAGE REGULATORS;

2-DOF; ELECTROSTATIC ACTUATION; IN-PLANE TWIST; MEMS SCANNER; PULL-IN; VERTICAL COMBDRIVE;

SCANNING;

EID: 53649107551     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.2004824     Document Type: Article

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