Characterization of micromechanical structures using white-light interferometry

Measurement Science and Technology

Volumn 14, Issue 10, 2003, Pages 1807-1814

  O'Mahony, Conor ^a   Hill, Martin ^b   Brunet, Magali ^a   Duane, Russell ^a   Mathewson, Alan ^a  

^a UNIVERSITY COLLEGE CORK   (Ireland)

^b Munster Technological University   (Ireland)

Author keywords

Interferometry; Mechanical properties; MEMS; Micromachining; Microsystems; Optical profiling; Surface profiling

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; ELASTIC MODULI; ELECTROSTATICS; FINITE ELEMENT METHOD; INTERFEROMETRY; NONDESTRUCTIVE EXAMINATION; RAMAN SPECTROSCOPY; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; SURFACE PHENOMENA; THIN FILMS;

WHITE LIGHT;

MICROELECTROMECHANICAL DEVICES;

INTERFEROMETRY; MECHANICAL PROPERTY;

EID: 0242369160     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/14/10/310     Document Type: Article

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