Development and verification of 2D dynamic electromechanical coupling solver for micro-electrostatic-actuator applications

Sensors and Actuators, A: Physical

Volumn 136, Issue 1, 2007, Pages 403-411

  Chen, Kuo Shen ^a   Ou, Kuang Shun ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Electromechanical coupling; Finite element analysis; MEMS; RF switches

Indexed keywords

BOUNDARY CONDITIONS; ELECTROMECHANICAL COUPLING; ELECTROSTATICS; FINITE ELEMENT METHOD; MICROACTUATORS;

DESIGN ANALYSIS; DIFFERENTIAL QUADRATIC METHOD (DQM); RF SWITCHES;

MEMS;

EID: 34247136227     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.10.042     Document Type: Article

References (30)

1. Wu M.C. Micromachining for optical and optoelectronic systems. Proc. IEEE 85 11 (1997) 1833-1856
2. Zengerle R., Ulrich J., Kluge S., Richter M., and Richter A. A bidirectional silicon micropump. Sens. Actuators A 50 (1995) 81-86
3. Yazdi N., Ayazi F., and Najafi K. Micromachined inertial sensors. Proc. IEEE 86 8 (1998) 1640-1659 Aug
4. Van Kessel P.F., Hornbeck L.J., Meier R.E., and Douglass M.R. A MEMS-based projection display. Proc. IEEE 86 8 (1998) 1687-1704
5. Yao J.J. RF MEMS from a device perspective. J. Micromech. Microeng. 10 (2000) R9-R38
6. Rebeiz G.M. RF MEMS Theory, Design, and Technology (2003), John Wiley & Sons Inc., Hoboken, New Jersey
7. McCarthy B., Adams G.G., McGruer N.E., and Pottet D. A dynamic model, including contact bounce, of an electrostatically actuated microswitch. IEEE/ASME J. Microeletromech. Syst. 11 3 (2002) 276-283
8. Kuang J.-H., and Chen C.-J. Dynamic characteristics of shaped micro-actuators solved using the differential quadrature method. J. Micromech. Microeng. 14 (2004) 647-655
9. Bellman R.E., Kashef B.G., and Casti J. Differential quadrature: a technique for the rapid solution of nonlinear partial equations. J. Comput. Phys. 10 (1972) 40-52
10. Wang X., and Bert C.W. A new approach in applying differential quadrature to static and free vibration analysis of beams and plates. J. Sound Vibrat. 162 (1993) 566-572
11. Feng Y., and Bert C.W. Application of the quadrature method to flexural vibration analysis of a geometrically nonlinear beam. Nonlinear Dyn. 3 (1992) 13-18
12. Tilmans H.A.C., and Legtenberg R. Electrostatically driven vacuum-encapsulated polysilicon resonators: part ii. theory and performance. Sens. Actuators A 45 (1994) 67-84
13. Coventor Inc. Coventor//User Handbook (2006), Coventor Inc.
14. http://www/intellisense.com.
15. http://www.memscap.com.
16. Zhou N., Clark J.V., and Pister K.S.J. Nodal analysis for MEMS design using SUGAR v0.5. Proceedings of the International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators (MSM). Santa Clara, CA, USA (1998) 308-313
17. Vandemeer J.E., Kranz M.S., and Fedder G.K. Hierarchical representation and simulation of micromachined inertial sensors. Proceedings of the International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators (MSM). Santa Clara, CA, USA (1998) 540-545
18. Lorenz G., and Neul R. Network-type modeling of micromachined sensor systems. Proceedings of the International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators (MSM). Santa Clara, CA, USA (1998) 233-238
19. Hung E.S., and Senturia S.D. Generating efficient dynamical models for microelectromechanical systems from a few finite-element simulation runs. IEEE/ASMEJ. Microelectromech. Syst. 8 (1999) 280-289
20. Chen K.-S., Ou K.-S., and Li L.-M. Development and accuracy assessment of simplified electromechanical coupling solvers for mems applications. J. Micromech. Microeng. 14 (2004) 159-169
21. Hibbit, Karlsson, and Sorensen Inc. ABAQUS/Explicit 5.8 User's Manual (1998), Hibbit, Karlsson, and Sorensen Inc., Pawtucket, RI
22. Senturia S.D. Microsystem Design (2000), Kluwer Academic Publish
23. Blech J.J. On isothermal squeezed films. J. Lubricat. Technol. 105 (1983) 615-620
24. Hamrock B.J. Fundamentals of Fluid Film Lubrication (1994), McGraw-Hill, New York pp. 117-166, 278-292
25. Gladwell G.M.L. Contact Problems in the Classical Theory of Elasticity (1980), Sijthoff & International, Netherlands
26. Johnson K.L. Contact Mechanics (2001), Cambridge University Press 132 pp
27. Solgaard O., Sandejas F.S.A., and Bloom D.M. Deformable grating optical modulator. Opt. Lett. 17 (1992) 688-690
28. Castaner L.M., and Senturia S.D. Speed-energy optimization of electrostatic actuatirs based on pull-in. IEEE/ASMEJ. Microeletromech. Syst. 8 (1999) 290-298
29. Singhose W., Seering W., and Singer N. Residual vibration reduction using vector diagrams to generate shaped inputs. J. Mech. Des. 116 (1994) 654-659
30. Popa D.O., Wen J.T., Stephanou H., Skidmore G., and Ellis M. Dynamic modeling and input shaping for MEMS. NSTI-Nanotech 2004, vol. 2 (2004) 315-318