Command-shaping techniques for electrostatic MEMS actuation: Analysis and simulation

Journal of Microelectromechanical Systems

Volumn 16, Issue 3, 2007, Pages 537-549

  Chen, Kuo Shen ^a   Ou, Kuang Shun ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Command shaping; Electrostatic actuation; Finite element analysis; Microelectromechanical systems (MEMS); System dynamics

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; ELECTROSTATICS; FINITE ELEMENT METHOD; SYSTEMS ANALYSIS;

COMMAND-SHAPING TECHNIQUES; ELECTROSTATIC ACTUATION; SYSTEM DYNAMICS;

MEMS;

EID: 34547812173     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.893512     Document Type: Article

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