Development and accuracy assessment of simplified electromechanical coupling solvers for MEMS applications

Journal of Micromechanics and Microengineering

Volumn 14, Issue 2, 2004, Pages 159-169

  Chen, K S ^a   Ou, K S ^a   Li, L M ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL SEQUENTIAL SOLVERS (EMS); ELECTROSTATIC DISTRIBUTED LOAD SOLVERS (EDS);

COMPUTER AIDED DESIGN; COMPUTER SIMULATION; ELECTRIC LOADS; ELECTRIC POTENTIAL; ELECTROSTATICS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 1242265202     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/2/001     Document Type: Article

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