A micro transportation system (MTS) with large movement of containers driven by electrostatic comb-drive actuators

Journal of Micromechanics and Microengineering

Volumn 17, Issue 10, 2007, Pages 2125-2131

  Pham, Phuc Hong ^a   Dao, Dzung Viet ^a   Sugiyama, Susumu ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; MICROACTUATORS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; VELOCITY MEASUREMENT;

ELECTROSTATIC COMB-DRIVE ACTUATORS; MICRO CONTAINERS; MICRO TRANSPORTATION SYSTEM (MTS);

MICROSYSTEMS;

EID: 34748902475     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/10/026     Document Type: Article

References (19)

1. Tang W C, Nguyen T H and Howe R T 1989 Laterally driven polysilicon resonant microstructures Tech. Dig. IEEE Micro Electro Mech. System Workshop (1989) pp 53-9
2. Tang W C, Nguyen T H, Michael W J and Howe R T 1990 Electrostatic-comb drive of lateral polysilicon resonators Sensors Actuators A 21-3 328-31
3. Johnson W A and Warne L K 1995 Electrophysics of micromechanical comb actuators J. Microelectromech. Syst. 4 49-59
4. Moussa W A, Ahmed H, Badawy W and Moussa M 2002 Investigating the reliability of electrostatic comb-drive actuators utilized in microfluidic and space systems using finite element analysis Can. J. Electr. Comput. Eng. 27 195-200
5. Legtenberg R, Groeneveld A W and Elwenspoek M 1996 Comb-drive actuators for large displacements J. Micromech. Microeng. 6 320-9
6. Grade J D, Jerman H and Kenny T W 2003 Design of large deflection electrostatic actuators J. MicroElectromech. Syst. 12 335-43
7. Harness T Y and Richard R A 2000 Characteristic modes of electrostatic comb-drive x-y microactuators J. Micromech. Microeng. 10 7-14
8. Kiang M H, Solgaard O, Lau K Y and Muller R S 1998 Electrostatic comb-drive-actuated micromirror for laser-beam scanning and positioning J. Microelectromech. Syst. 7 27-37
9. Sniegowski J and Garcia E 1996 Surface-micromachined geartrains driven by an on-chip electrostatic microengine IEEE Electron Device Lett. 17 366
10. Sniegowski J, Miller S, LaVigne G, Rodgers M and McWhorter P 1996 Monolithic geared-mechanisms driven by a polysilicon surface-micromachined on-chip electrostatic microengine Proc. Solid-State Sensor and Actuator Workshop (1996) pp 178-82
11. Konishi S and Fujita H 1994 A conveyance system using air flow based on the concept of distributed micro motion systems IEEE J. Microelectromech. Syst. 3 54-8
12. Fukuta Y, Yanada M, Ino A, Mita Y, Chapuis Y A, Konishi S and Fujita H 2004 Conveyor for pneumatic two-dimensional manipulation realized by arrayed MEMS and its control J. Robot. Mechatron. 16 163-70
13. Shigematsu T and Kurosawa M K 2004 XY surface acoustic wave motor with nanometer resolution Proc. of 21st Sensor Symp. (2004) pp 237-40
14. Yeh R, Hollar S and Pister K S J 2002 Single mask, large force, and large displacement electrostatic linear inchworm motors J. Microelectromech. Syst. 11 330-6
15. Fujimasa I 1996 Micromachines, a New ERA in Mechanical Engineering (Oxford: Oxford University Press) p 115-7 135
16. Tanner D M et al 2001 Reliability of a MEMS torsional ratcheting actuator IEEE 39th Ann. Int. Reliability Physics Symp. (Orlando, FL)
17. Sacks E and Barnes S M 2001 Computer-aided kinematic design of a torsional ratcheting actuator Proc. Fourth Int. Conf. on Modeling and Simulation of Microsystems (Hilton Head, SC)
18. Pham P H et al 2006 Straight movement of micro containers based on ratchet mechanism and electrostatic comb-drive actuators J. Micromech. Microeng. 16 2532-8
19. Noguchi K, Fujita H, Suzuki M and Yoshimura N 1991 The measurements of friction on micromechatronics elements Proc. of an Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE-MEMS'91 pp 148-53