Planar frictional micro-conveyors with two degrees of freedom

Journal of Micromechanics and Microengineering

Volumn 18, Issue 6, 2008, Pages

  Shay, Byron ^a   Hubbard, Ted ^a   Kujath, Marek ^a  

^a DALHOUSIE UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

FRICTION; MECHANICS; SILICON; SILICON ON INSULATOR TECHNOLOGY; YTTRIUM ALLOYS;

DEGREES OF FREEDOMS; FRICTIONAL CONTACTS; LINEAR SPEEDS; ROTATIONAL SPEEDS; SILICON-ON-INSULATOR TECHNOLOGIES; THERMAL ACTUATORS; YAW MOTIONS;

CONVEYORS;

EID: 57249087608     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/6/065009     Document Type: Conference Paper

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