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Volumn , Issue , 2009, Pages 45-48

Tangential and perpendicular driving micro transmission systems based on ratchet mechanism and electrostatic actuator

Author keywords

Electrostatic actuator; Micro container; Ratchet mechanism; Transportation system

Indexed keywords

COMB-DRIVE ACTUATOR; DRIVING FORCES; DRIVING FREQUENCIES; DRIVING MODE; MICRO CONVEYANCE SYSTEM; MICRO MOTION; MICRO-OBJECTS; MOVING DIRECTION; NEW DESIGN; RATCHET MECHANISMS; TANGENTIAL FORCE; TRANSMISSION SYSTEMS; TRANSPORTATION SYSTEM;

EID: 71449111023     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285569     Document Type: Conference Paper
Times cited : (4)

References (12)
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    • Cho, S.K.1
  • 2
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    • Pister, K.S.J.1
  • 4
    • 0034276117 scopus 로고    scopus 로고
    • A robust micro conveyer realized by arrayed polyimide joint actuators
    • T. Ebefors et al "A robust micro conveyer realized by arrayed polyimide joint actuators", J. Micromech. Microeng. 10 (2000), pp. 337-349.
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    • Ebefors, T.1
  • 6
    • 33745801983 scopus 로고    scopus 로고
    • XY Surface Acoustic Wave Motor with Nanometer Resolution
    • T Shigematsu et al, "XY Surface Acoustic Wave Motor with Nanometer Resolution", 21st Sensors Sympo. (2004), pp. 237-240.
    • (2004) 21st Sensors Sympo , pp. 237-240
    • Shigematsu, T.1
  • 8
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    • Two-dimensional micro conveyer with integrated electrostatic actuators, The 12th IEEE
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  • 9
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    • Surface-Micromachined Gear Trains Driven by an On-Chip Electrostatic Microengine
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    • Sniegowski, J.1    Garcia, E.I.2
  • 11
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    • Straight Movement of Micro Containers Based on Ratchet Mechanism and Electrostatic Comb-Drive Actuators
    • Phuc Hong Pham, Dzung Viet Dao et al, "Straight Movement of Micro Containers Based on Ratchet Mechanism and Electrostatic Comb-Drive Actuators", J. Micromech. Microeng.Vol.16, No12 (2006), p2532
    • (2006) J. Micromech. Microeng , vol.16 , Issue.NO12 , pp. 2532
    • Hong Pham, P.1    Viet Dao, D.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.