High performance bidirectional electrostatic inchworm motor fabricated by trench isolation technology

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 53-56

  Sarajlic, E ^a   Berenschot, E ^a   Tas, N ^a   Fujita, H ^b   Krijnen, G ^a   Elwenspoek, M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

Electrostatic micro actuators; Inchworm motion; Shuffle motors; Trench isolation

Indexed keywords

ACTUATORS; FREQUENCIES; MICROMACHINING; SURFACES; VOLTAGE MEASUREMENT;

ELECTROSTATIC MICRO-ACTUATORS; INCHWORM ISOLATION; SHUFFLE MOTORS; TRENCH ISOLATION;

ELECTROSTATICS;

EID: 27544501336     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. Tas N, Wissink J, Sander L, Lammerink T and Elwenspoek M 1998 Modeling, design and testing of the electrostatic shuffle motor Sensors and Actuators A 70 171-178
2. de Boer M P, Luck D L, Ashurst W R, Maboudian R, Corwin A D, Walraven J A, Redmond J M 2004 High performance surface-micromachined inchworm actuator J. Microelectormech. Syst. 13 63-74
3. Akiyama T, Collard D and Fujita H 1997 Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS J. Microelectormech. Syst. 6(1) 10-17
4. Li L, Brown G and Uttamchandani 2002 Study of scratch drive actuator force characteristics J. Micromech. Microeng. 12 736-741
5. Yeh R, Hollar S and Pister K S J 2002 Single mask, large force and large displacement electrostatic linear inchworm motors J. Microelectormech. Syst. 11(4) 330-336
6. Sarajlic E, Berenschot E, Krijnen G and Elwenspoek 2003 A low volume electrostatic inchworm microactuator with high-resolution and large force 17th European Conference on Solid-State Transducers (EUROSENSORS) (Guimaraes, Portugal) 194-195
7. Sarajlic E, Berenschot E, Fujita H, Krijnen G and Elwenspoek 2003 Bidirectional electrostatic linear shuffle motor with two degrees of freedom 18th Int. Conf. On MEMS (MEMS 2005) (Miami, USA) 391-394