A normally latched, large-stroke, inchworm microactuator

Journal of Micromechanics and Microengineering

Volumn 17, Issue 8, 2007, Pages 1715-1720

  Toda, Risaku ^a   Yang, Eui Hyeok ^a,b  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b STEVENS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LOADS (FORCES); NANOTECHNOLOGY; PIEZOELECTRIC ACTUATORS; PRECISION ENGINEERING; STRESS ANALYSIS;

ACTUATOR VOLTAGE; PZT-STACK ACTUATOR; SLIDER GRIP;

MICROACTUATORS;

EID: 34547678081     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/8/039     Document Type: Article

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