High-resolution inchworm linear motor based on electrostatic twisting microactuators

Journal of Micromechanics and Microengineering

Volumn 15, Issue 9, 2005, Pages 1674-1682

  Kim, Sang Ho ^a   Hwang, Il Han ^a   Jo, Kyoung Woo ^a   Yoon, Eui Sung ^b   Lee, Jong Hyun ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; FINITE ELEMENT METHOD; INTERFEROMETERS; MICROACTUATORS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

COUPLED MOTION; DIFFERENTIAL VOLTAGE; MICROMOTORS; OPTICAL INTERFEROMETERS;

LINEAR MOTORS;

EID: 23944439988     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/9/009     Document Type: Article

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