Modeling of dry stiction in micro electro-mechanical systems (MEMS)

Journal of Micromechanics and Microengineering

Volumn 16, Issue 7, 2006, Pages 1195-1206

  Hariri, A ^a   Zu, J W ^a   Ben Mrad, R ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; MATHEMATICAL MODELS; PLASTIC DEFORMATION; RELIABILITY; VAN DER WAALS FORCES;

EQUILIBRIUM CONDITION; INTERACTING SURFACES; MICRO ELECTRO-MECHANICAL SYSTEMS (MEMS); TOPOGRAPHIC DATA;

MICROELECTROMECHANICAL DEVICES;

EID: 33745078614     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/7/012     Document Type: Article

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