Design and characterization of a micromachined inchworm motor with thermoelastic linkage actuators

Sensors and Actuators, A: Physical

Volumn 103, Issue 1-2, 2003, Pages 143-149

  Kwon, Ho Nam ^a   Jeong, Sung Ho ^a   Lee, Sun Kyu ^a   Lee, Jong Hyun ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

Actuator; Inchworm; Linkage; Microassembly; Micromachined; Thermoelastic

Indexed keywords

ACTUATORS; AMPLIFICATION; FABRICATION; MICROMACHINING; THERMOELASTICITY;

THERMOELASTIC LINKAGE ACTUATORS;

MOTORS;

EID: 0037439023     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00308-4     Document Type: Conference Paper

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