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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 29, Issue 2, 2011, Pages

Highly textured growth of AlN films on sapphire by magnetron sputtering for high temperature surface acoustic wave applications

(6) Aubert, T a Assouar, M B a Legrani, O a Elmazria, O a Tiusan, C a Robert, S a

a INSTITUT JEAN LAMOUR (France)

Author keywords

[No Author keywords available]

Indexed keywords

AIR-ANNEALING; ALN FILMS; ALUMINUM NITRIDE FILMS; ANNEALING PROCESS; BEFORE AND AFTER; COLUMNAR MICROSTRUCTURES; HIGH TEMPERATURE; HIGH-NITROGEN; HIGH-TEMPERATURE ENVIRONMENT; IN-PLANE TEXTURE; PIEZOELECTRIC PROPERTY; PROCESS CONDITION; REACTIVE MAGNETRON SPUTTERING; ROCKING CURVES; SAPPHIRE SUBSTRATES; SAW DEVICE; SURFACE ACOUSTIC WAVE DEVICE; SURFACE ACOUSTIC WAVES; TEXTURED GROWTH; XRD;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; ALUMINUM COATINGS; ATOMIC FORCE MICROSCOPY; FREQUENCY RESPONSE; HIGH TEMPERATURE APPLICATIONS; NITRIDES; PIEZOELECTRICITY; SAPPHIRE; SUBSTRATES; TEXTURES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

ALUMINUM NITRIDE;

EID: 79952408208 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3551604 Document Type: Article

Times cited : (56)

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