Is there a better material for thin film BAW applications than AlN?

Proceedings - IEEE Ultrasonics Symposium

Volumn 1, Issue , 2005, Pages 315-320

  Muralt, P ^a   Antifakos, J ^a   Cantoni, M ^a   Lanz, R ^a   Martin, F ^a  

^a EPFL   (Switzerland)

Author keywords

Aluminum nitride; Bulk acoustic waves; Ferrodectrics

Indexed keywords

ACOUSTICS; ALUMINUM COMPOUNDS; FERROELECTRIC MATERIALS; MICROWAVE FILTERS; RELAXATION PROCESSES; THIN FILMS;

DOMAIN WALL MOTIONS; FERROELASTICS; FERROELECTRIC FILMS; INDUSTRIAL FABRICATION;

ACOUSTIC BULK WAVE DEVICES;

EID: 33847137644     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2005.1602858     Document Type: Conference Paper

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