Growth and characterization of c-axis inclined AlN films for shear wave devices

Semiconductor Science and Technology

Volumn 23, Issue 9, 2008, Pages

  Fardeheb Mammeri, A ^a,b   Assouar, M B ^a   Elmazria, O ^a   Fundenberger, J J ^c   Benyoucef, B ^b  

^a INSTITUT JEAN LAMOUR   (France)

^b UNIVERSITY OF TLEMCEN   (Algeria)

^c UNIVERSITÉ PAUL VERLAINE METZ   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC WAVES; MAGNETRON SPUTTERING; NONMETALS; SHEAR WAVES; SILICON; SILICON COMPOUNDS; THICK FILMS;

ALN FILMS; ALN THIN FILMS; C -AXIS; LIQUID SENSORS; LOW TEMPERATURE; PLANAR SYSTEMS; RF-MAGNETRON SPUTTERING; SHEAR MODE RESONATORS; WAVE GENERATION;

SILICON WAFERS;

EID: 51849167274     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/23/9/095013     Document Type: Article

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