Hypersonic characterization of sound propagation velocity in AlxGa1-xN thin films

Journal of Applied Physics

Volumn 92, Issue 11, 2002, Pages 6868-6874

  Jiménez Riobóo, Rafael J ^a   Rodriquez Canas E ^a   Vila, M ^a   Prieto, C ^a   Calle, F ^b   Palacios, T ^b   Sanchez M A ^b   Omnes F ^c   Ambacher, O ^d,f   Assouar, B ^e   Elmazria, O ^e  

^a INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

^b UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

^c CRHEA CNRS   (France)

^d WALTER SCHOTTKY INSTITUT   (Germany)

^e INSTITUT JEAN LAMOUR   (France)

^f ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE PROPAGATION; ACOUSTIC WAVE VELOCITY; ALUMINUM; COMPUTER SIMULATION; EPITAXIAL GROWTH; MAGNETRON SPUTTERING; SPECTROSCOPIC ANALYSIS; SUBSTRATES;

BULK ACOUSTIC WAVES (BAW);

THIN FILMS;

EID: 0036904540     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1517728     Document Type: Article

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