Impact of thermal treatment upon morphology and crystallinity of strontium titanate films deposited by atomic layer deposition

Journal of Vacuum Science and Technology B

Volumn 29, Issue 1, 2011, Pages

  Popovici, Mihaela ^a   Van Elshocht, Sven ^a   Menou, Nicolas ^b   Favia, Paola ^a   Bender, Hugo ^a   Rosseel, Erik ^a   Swerts, Johan ^a   Adelmann, Christoph ^a   Vrancken, Christa ^a   Moussa, Alain ^a   Tielens, Hilde ^a   Tomida, Kazuyuki ^a   Pawlak, Malgorzata ^a   Kaczer, Ben ^a   Schoofs, Geert ^a   Vandervorst, Wilfried ^a,c   Wouters, Dirk J ^a   Kittl, Jorge A ^a  

^a IMEC   (Belgium)

^b Kaneka   (Belgium)

^c KU LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION; CRYSTALLINITY; HEAT TREATMENT; METAL INSULATOR BOUNDARIES; MICROELECTRONICS; PEROVSKITE; STRONTIUM TITANATES; TOPOGRAPHY;

CUBIC PEROVSKITE; GRAIN SIZE; HIGH DIELECTRIC CONSTANTS; METAL INSULATOR METAL CAPACITOR (MIM); MIM CAPACITORS; PROCESS CONDITION; SEED LAYER; TOP LAYERS;

MIM DEVICES;

EID: 79551661584     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.3534018     Document Type: Conference Paper

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