In situ characterization of atomic layer deposition of SrTiO3

Journal De Physique. IV : JP

Volumn 11, Issue 3, 2001, Pages

  Rahtu, A ^a   Hanninen T ^a   Ritala, M ^a  

^a UNIVERSITY OF HELSINKI   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTALS; MASS SPECTROMETERS; PHYSICAL VAPOR DEPOSITION; QUARTZ; STRONTIUM COMPOUNDS; TITANIUM DIOXIDE; WATER;

ATOMIC LAYER DEPOSITION (ALD);

THIN FILMS;

EID: 0034848603     PISSN: 11554339     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1051/jp4:20013115     Document Type: Conference Paper

References (25)

1. Atomic layer epitaxy