Depth profiling of dielectric SrTiO3 thin films by angle-resolved x-ray photoelectron spectroscopy

Applied Physics Letters

Volumn 89, Issue 25, 2006, Pages

  Bhaskar, S ^a   Allgeyer, Dan ^a   Smythe III, John A ^a  

^a MICRON TECHNOLOGY INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPTH PROFILING; PHOTOELECTRON TRANSITIONS; TAKE-OFF ANGLE (TOA);

AMORPHOUS MATERIALS; ANNEALING; DIELECTRIC MATERIALS; STOICHIOMETRY; STRONTIUM COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

ULTRATHIN FILMS;

EID: 33845917731     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2410232     Document Type: Article

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