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Volumn 21, Issue 1, 2011, Pages

Analysis and wafer-level design of a high-order silicon vibration isolator for resonating MEMS devices

Author keywords

[No Author keywords available]

Indexed keywords

BEAM DESIGN; BONDING PADS; CLAMPED-CLAMPED BEAM; ELECTRICAL INTERCONNECTS; EXTERNAL VIBRATIONS; HIGH-ORDER; ISOLATION PERFORMANCE; ISOLATION PLATFORM; LASER DOPPLER; LATERAL VIBRATIONS; MECHANICAL SPRINGS; MECHANICAL VIBRATIONS; MEMS PACKAGES; MEMSDEVICES; MULTIPLE PLATFORMS; PRELIMINARY DESIGN; SIDE EFFECT; SILICON WAFER SUBSTRATES; THERMAL RESISTANCE; TORSION BEAMS; VACUUM PACKAGING; VERTICAL FEEDTHROUGHS; VIBRATION ISOLATORS; VIBROMETERS; WAFER LEVEL;

EID: 78651520728     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/1/015017     Document Type: Article
Times cited : (19)

References (23)
  • 1
    • 48349146605 scopus 로고    scopus 로고
    • Multi-degree of freedom tuning fork gyroscope demonstrating shock rejection
    • Schofield A R, Trusov A A and Shkel A M 2007 Multi-degree of freedom tuning fork gyroscope demonstrating shock rejection Proc. IEEE Sensors pp 120-3
    • (2007) Proc. IEEE Sensors , pp. 120-123
    • Schofield, A.R.1    Trusov, A.A.2    Shkel, A.M.3
  • 2
    • 0036913170 scopus 로고    scopus 로고
    • Single-chip surface micromachined integrated gyroscope with 500/h Allan deviation
    • Geen J A, Sherman S J, Chang J F and Lewis S R 2002 Single-chip surface micromachined integrated gyroscope with 500/h Allan deviation IEEE J. Solid-State Circuits 37 1860-6
    • (2002) IEEE J. Solid-State Circuits , vol.37 , pp. 1860-1866
    • Geen, J.A.1    Sherman, S.J.2    Chang, J.F.3    Lewis, S.R.4
  • 5
    • 33845573059 scopus 로고    scopus 로고
    • Designing vibration and shock isolation systems for micro electrical machined based inertial measurement units
    • Braman T and Grossman O 2006 Designing vibration and shock isolation systems for micro electrical machined based inertial measurement units Proc. IEEE/ION Position, Location, and Navigation Symposium (PLANS) pp 400-4
    • (2006) Proc. IEEE/ION Position, Location, and Navigation Symposium (PLANS) , pp. 400-404
    • Braman, T.1    Grossman, O.2
  • 6
    • 0032014463 scopus 로고    scopus 로고
    • A micromachined vibration isolation system for reducing the vibration sensitivity of surface transverse wave resonators
    • Reid J R, Bright V M and Kosinski J A 1998 A micromachined vibration isolation system for reducing the vibration sensitivity of surface transverse wave resonators IEEE Trans. Ultrason. Ferroelectr. Freq. Control 45 528-34
    • (1998) IEEE Trans. Ultrason. Ferroelectr. Freq. Control , vol.45 , pp. 528-534
    • Reid, J.R.1    Bright, V.M.2    Kosinski, J.A.3
  • 9
    • 77955184414 scopus 로고    scopus 로고
    • Active vibration control and isolation for micromachined devices
    • Kim S J, Dean R, Flowers G and Chen C 2009 Active vibration control and isolation for micromachined devices ASME J. Mech. Des. 131 091002
    • (2009) ASME J. Mech. des , vol.131 , pp. 091002
    • Kim, S.J.1    Dean, R.2    Flowers, G.3    Chen, C.4
  • 10
    • 33947628243 scopus 로고    scopus 로고
    • Active isolation of electronic micro-components with piezoelectrically transduced silicon MEMS devices
    • Meyer Y, Verdot T, Collet M, Baborowski J and Muralt P 2007 Active isolation of electronic micro-components with piezoelectrically transduced silicon MEMS devices Smart Mater. Struct. 16 128-34
    • (2007) Smart Mater. Struct , vol.16 , pp. 128-134
    • Meyer, Y.1    Verdot, T.2    Collet, M.3    Baborowski, J.4    Muralt, P.5
  • 11
    • 0004175949 scopus 로고    scopus 로고
    • 2nd edn Englewood Cliffs, NJ: Prentice-Hall
    • Inman D J 2000 Engineering Vibration 2nd edn (Englewood Cliffs, NJ: Prentice-Hall)
    • (2000) Engineering Vibration
    • Inman, D.J.1
  • 16
    • 27944478243 scopus 로고    scopus 로고
    • MEMS-based angular rate sensors
    • Song I and Lee B 2004 MEMS-based angular rate sensors Proc. IEEE Sensors vol 2 pp 650-3
    • (2004) Proc. IEEE Sensors , vol.2 , pp. 650-653
    • Song, I.1    Lee, B.2
  • 19
    • 22444435478 scopus 로고    scopus 로고
    • An x-axis single-crystalline silicon microgyroscope fabricated by the extended SBM process
    • Kim J, Park S, Kwak D, Ko H and Cho D D 2005 An x-axis single-crystalline silicon microgyroscope fabricated by the extended SBM process J. Microelectromech. Syst. 14 444-55
    • (2005) J. Microelectromech. Syst. , vol.14 , pp. 444-455
    • Kim, J.1    Park, S.2    Kwak, D.3    Ko, H.4    Cho, D.D.5
  • 22
    • 0037438782 scopus 로고    scopus 로고
    • Shock resistance of ferromagnetic micromechanical magnetometers
    • Yee J K, Yang H H and Judy J W 2003 Shock resistance of ferromagnetic micromechanical magnetometers Sensors Actuators A 103 242-52
    • (2003) Sensors Actuators A , vol.103 , pp. 242-252
    • Yee, J.K.1    Yang, H.H.2    Judy, J.W.3
  • 23
    • 34948869345 scopus 로고    scopus 로고
    • Sub-micro-gravity in-plane accelerometers with reduced capacitive gaps and extra seismic mass
    • Abdolvand R, Amini B V and Ayazi F 2007 Sub-micro-gravity in-plane accelerometers with reduced capacitive gaps and extra seismic mass J. Microelectromech. Syst. 16 1036-43
    • (2007) J. Microelectromech. Syst. , vol.16 , pp. 1036-1043
    • Abdolvand, R.1    Amini, B.V.2    Ayazi, F.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.