Vibration sensitivity of MEMS tuning fork gyroscopes

Proceedings of IEEE Sensors

Volumn , Issue , 2007, Pages 115-119

  Yoon, Sang Won ^a   Lee, Sang Woo ^a   Perkins, N C ^a   Najafi, Khalil ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GYROSCOPES; MATLAB; MEMS; MICROELECTROMECHANICAL DEVICES; SENSORS; TUNING;

DIFFERENTIAL OPERATIONS; MEMS TUNING FORK GYROSCOPES; NON LINEARITIES; NONLINEAR DYNAMIC SIMULATIONS; VIBRATION CHARACTERISTICS; VIBRATION SENSITIVITIES;

VIBRATORS;

EID: 48349102557     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.4388349     Document Type: Conference Paper

References (9)

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