Vibration isolation of MEMS sensors for aerospace applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4828, Issue , 2002, Pages 166-170

  Dean, Robert ^a   Flowers, George ^a   Hodel, Scotte ^a   MacAllister, Ken ^a   Horvath, Roland ^a   Matras, Alex ^a   Glover, Rob ^a  

^a AUBURN UNIVERSITY   (United States)

Author keywords

Gyroscope; MEMS; Missile; Packaging

Indexed keywords

AEROSPACE APPLICATIONS; ELECTRONICS PACKAGING; GYROSCOPES; MISSILES; SENSORS; SIGNAL PROCESSING; VIBRATIONS (MECHANICAL);

VIBRATION ISOLATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0036425568     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. Gregory T.A. Kovacs, "Micromachined Transducers Sourcebook", McGraw-Hill Publishers, New York, Chapter 3, p.243.
2. Robert Dean, Alex Matras, Lori Thomas, Holly Garrison, Nicole Schutz, Ken MacAllister and Steven Tully, "A Laminate Based MEMS Accelerometer," 3rd Advanced Technology Workshop on Packaging of MEMS and Related Micro Integrated Nano Systems, IMAPS, Nov. 8-10, 2001.