High performance matched-mode tuning fork gyroscope

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 66-69

  Zaman, M F ^a   Sharma, A ^a   Ayazi, F ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; NATURAL FREQUENCIES; NUMERICAL ANALYSIS; THERMAL EFFECTS; TUNING;

ANGLE RANDOM WALK (ARW); MODE MATCHING; TEMPERATURE CHARACTERIZATION; TUNING FORK;

GYROSCOPES;

EID: 33750118637     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. M.F. Zaman, A. Sharma, B. Amini, F. Ayazi, "The Resonating Star Gyroscope", Proceedings IEEE Conference on MEMS, 2005, pp. 355-358.
2. A. Sharma, M.F. Zaman, B. Amini, F. Ayazi, "A High-Q In-Plane SOI Tuning Fork Device", Proceedings IEEE Conference on Sensors, October 2004, pp. 467-470.
3. F. Ayazi, K. Najafi, "A HARPSS Polysilicon Vibrating Ring Gyroscope", IEEE Journal of Microelectromechanical Systems, Vol. 10, June 2001, pp. 169-179.
4. W.A. Clark, "Micromachined Vibratory Rate Gyroscopes," Ph.D. Dissertation, University of California, Berkeley (1997).
5. IEEE Std. 952 - 1997, IEEE Standard Spec. Format Guide and Test Procedure for Single-axis IFOG.