An x-axis single-crystalline silicon microgyroscope fabricated by the extended SBM process

Journal of Microelectromechanical Systems

Volumn 14, Issue 3, 2005, Pages 444-455

  Kim, Jongpal ^a,b   Park, Sangjun ^a   Kwak, Donghun ^a   Ko, Hyoungho ^a   Cho, Dong Il Dan ^a  

^a Seoul National University   (South Korea)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

Extended sacrificial bulk micromachining (SBM); Single crystalline silicon; Vertical motion; X axis gyroscopes

Indexed keywords

ACCELEROMETERS; GYROSCOPES; MICROMACHINING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SINGLE CRYSTALS;

EXTENDED SACRIFICIAL BULK MICROMACHINING (SBM); SINGLE CRYSTALLINE SILICON; VERTICAL MOTION; X AXIS GYROSCOPES;

MICROELECTROMECHANICAL DEVICES;

EID: 22444435478     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.844799     Document Type: Article

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