A micromachined vibration isolation system for reducing the vibration sensitivity of surface transverse wave resonators

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 45, Issue 2, 1998, Pages 528-534

  Robert Reid, J ^a   Bright, Victor M ^b   Kosinski, John A ^c  

^a AIR FORCE RESEARCH LABORATORY   (United States)

^b University of Colorado at Boulder   (United States)

^c US Army Communications and Electronics Command   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; FINITE ELEMENT METHOD; MACHINE VIBRATIONS; MICROMACHINING; SENSITIVITY ANALYSIS; VIBRATION CONTROL;

SURFACE TRANSVERSE WAVE (STW) RESONATORS;

RESONATORS;

EID: 0032014463     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.660162     Document Type: Article

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