MEMS-based angular rate sensors

Proceedings of IEEE Sensors

Volumn 2, Issue , 2004, Pages 650-653

  Song, Inseob ^a   Lee, Byeungleul ^a  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

Commercialization; Gyroscope; Mems based Angular Rate Sensor

Indexed keywords

ANGLE MEASUREMENT; CONSUMER ELECTRONICS; COSTS; GYROSCOPES; MARKETING; MICROELECTROMECHANICAL DEVICES;

COMMERCIALIZATION; MEMS-BASED ANGULAR RATE SENSOR; SAMSUNG (CO);

SENSORS;

EID: 27944478243     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. John A. Geen, Steven J. Sherman, John F. Chang , and Stephen R. Lewis, "Single-chip surface micro-machined integrated gyroscope with 50 °/h Allan deviation", IEEE J. Solid-State Circuits, vol. 37, No. 12, Dec. 2002, pp. 1860-1866.
2. Hee-Moon Jung, JunO Kim, and Sung Kyu Ha, "Robust design of decoupled vibratory microgyroscope considering over-etching as a fabrication tolerance factor", submitted to JSME, 2004.
3. Vladimir Skvortzov, Yong Chul Cho, Byeungleul Lee, Cimoo Song, "Development of a gyro test system at Samsung Advanced Institute of Technology", in Proc. of the IEEE Position Location and Navigation Symposium (PLANS) 2004, Hyatt Regency, 26-29 April 2004, Monterey, CA, pp. 133-142.