Active vibration control and isolation for micromachined devices

Journal of Mechanical Design

Volumn 131, Issue 9, 2009, Pages 0910021-0910026

  Kim, Seong Jin ^a   Dean, Robert ^a   Flowers, George ^a   Chen, Chen ^a  

^a AUBURN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN; ELECTROMECHANICAL FILTERS; ELECTROSTATIC ACTUATORS; GYROSCOPES; LOW PASS FILTERS; MEMS; PASSIVE FILTERS;

ACTIVE VIBRATION CONTROLS; ACTIVE VIBRATION ISOLATION; FILTER STRUCTURES; HARSH ENVIRONMENT; HIGH FREQUENCY HF; LOW PRESSURE ENVIRONMENT; MEMS (MICROELECTROMECHANICAL SYSTEM); MICRO-MACHINED; MICROMACHINED DEVICES; VIBRATION ISOLATORS;

VIBRATIONS (MECHANICAL);

EID: 77955184414     PISSN: 10500472     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.3159042     Document Type: Article

References (17)

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