Residual stress measurement in thin carbon films by Raman spectroscopy and nanoindentation

Thin Solid Films

Volumn 429, Issue 1-2, 2003, Pages 190-200

  Taylor, Craig A ^a   Wayne, Mark F ^a   Chiu, Wilson K S ^a  

^a UNIVERSITY OF CONNECTICUT   (United States)

Author keywords

Nanoindentation; Pyrolytic carbon; Raman spectroscopy; Residual stress

Indexed keywords

CARBON; OPTICAL FIBERS; RAMAN SPECTROSCOPY; RESIDUAL STRESSES;

THIN CARBON FILMS;

THIN FILMS;

EID: 0037622009     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00276-1     Document Type: Article

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