Chemical bonding modifications of tetrahedral amorphous carbon and nitrogenated tetrahedral amorphous carbon films induced by rapid thermal annealing

Thin Solid Films

Volumn 482, Issue 1-2, 2005, Pages 34-40

  McCann, R ^a   Roy, S S ^a   Papakonstantinou, P ^a   Bain, M F ^b   Gamble, H S ^b   McLaughlin, J A ^a  

^a UNIVERSITY OF ULSTER   (United Kingdom)

^b QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

Author keywords

Amorphous carbon films; Annealing; Carbon nitride; X ray spectroscopy

Indexed keywords

ANNEALING; CARBON NITRIDE; GRAPHITE; SPECTRUM ANALYSIS; STOICHIOMETRY; THERMAL EFFECTS; THIN FILMS; X RAY SPECTROSCOPY;

AMORPHOUS CARBON FILMS; CARBON FILMS; TEMPERATURE RANGE; THERMAL ANNEALING;

CARBON;

EID: 17644374116     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.11.151     Document Type: Conference Paper

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