Hard coatings for mechanical applications

Vacuum

Volumn 64, Issue 3-4, 2002, Pages 181-190

  Bertran, E ^a   Pino, F J ^a   Viera, G ^a   Andujar J L ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Amorphous carbon; Amorphous carbon nitride; Ion beam source; rf magnetron sputtering

Indexed keywords

CARBON NITRIDE; ION BEAMS; ION BOMBARDMENT; MAGNETRON SPUTTERING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS;

HARD COATINGS;

PROTECTIVE COATINGS;

EID: 8444221187     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(01)00336-0     Document Type: Article

References (11)