Ion probe detection of clusters in a remotely expanding thermal plasma

Plasma Sources Science and Technology

Volumn 19, Issue 6, 2010, Pages

  Petcu, M C ^a   Sarkar, A ^a   Bronneberg, A C ^a   Creatore, M ^a   Van De Sanden, M C M ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

BACKGROUND GAS; CAPACITIVE PROBE; CLUSTER DETECTION; DOWNSTREAM REGION; EXPANDING THERMAL PLASMAS; GAUSSIANS; ION FLUXES; ION PEAKS; ION PROBE; OFF-AXIS; PLASMA BEAM; PLASMA CHEMISTRIES; RADIAL PROFILES; THERMOPHORETIC;

CHEMISTRY; IONS; PROBES; SEMICONDUCTING SILICON COMPOUNDS;

PLASMAS;

EID: 78649918337     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/19/6/065012     Document Type: Article

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