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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 2, 1996, Pages 577-581

Synthesis of silicon nitride particles in pulsed radio frequency plasmas

(2) Buss, R J a Babu, S V b

a SANDIA NATIONAL LABORATORIES (United States)

b Clarkson University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FOURIER TRANSFORM INFRARED SPECTROSCOPY; GLOW DISCHARGES; GROWTH (MATERIALS); LIGHT SCATTERING; MORPHOLOGY; NUCLEATION; OXIDATION; PARTICLE SIZE ANALYSIS; PARTICLES (PARTICULATE MATTER); PLASMAS; SILANES; SYNTHESIS (CHEMICAL);

EX SITU PARTICLE ANALYSIS; HYDROGENATED PARTICLES; IN SITU LASER LIGHT SCATTERING; POLYDISPERSITY; PULSED RADIO FREQUENCY PLASMAS;

SILICON NITRIDE;

EID: 0030110569 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.580148 Document Type: Article

Times cited : (17)

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