Particle trapping, transport, and charge in capacitively and inductively coupled argon plasmas in a Gaseous Electronics Conference Reference Cell

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 2, 1996, Pages 634-638

  Collins, S M ^a   Brown, D A ^b   O'Hanlon, J F ^a   Carlile, R N ^a  

^a University of Arizona   (United States)

^b VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030528970     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580158     Document Type: Article

References (10)

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