SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Pure and Applied Chemistry

Volumn 68, Issue 5, 1996, Pages 1121-1126

Formation of dense submicronic clouds in low pressure Ar-SiH4 RF reactor: Diagnostics and growth processes from monomers to large size particulates

(8) Bouchoule, A a Boufendi, L a Hermann, J a Plain, A a Hbid, T b Kroesen, G c Stoffels, E c Stoffels, W W c

a UNIVERSITÉ D'ORLÉANS (France)

b UNIVERSITÉ DE TOULOUSE (France)

c EINDHOVEN UNIVERSITY OF TECHNOLOGY (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001402789 PISSN: 00334545 EISSN: None Source Type: Journal
DOI: 10.1351/pac199668051121 Document Type: Article

Times cited : (24)

References (16)

1
- 2542581278
- G.S. SELWYN, Plasma Sources Science and Technology(P.S.S.T.); 3, 340-347
- Plasma Sources Science and Technology(P.S.S.T.) , vol.3 , pp. 340-347
- Selwyn, G.S.¹

2
- 0038090633
- W. STOFFELS, E. STOFFELS, G. KROESEN; P.S.S.T., 3, 1994, 320-324
- (1994) P.S.S.T. , vol.3 , pp. 320-324
- Stoffels, W.¹ Stoffels, E.² Kroesen, G.³

3
- 0013364272
- G.M. JELLUM, D.B. GRAVES; Appl. Phys. Lett.; 57, 2077 A. GARSCADDEN, B.N. GANGULY, P. D. HAALAND, J. WILLIAMS. P.S.S.T., 3, 239
- Appl. Phys. Lett. , vol.57 , pp. 2077
- Jellum, G.M.¹ Graves, D.B.²

4
- 36149034135
- G.M. JELLUM, D.B. GRAVES; Appl. Phys. Lett.; 57, 2077 A. GARSCADDEN, B.N. GANGULY, P. D. HAALAND, J. WILLIAMS. P.S.S.T., 3, 239
- P.S.S.T. , vol.3 , pp. 239
- Garscadden, A.¹ Ganguly, B.N.² Haaland, P.D.³ Williams, J.⁴

5
- 0009585296
- H.M. ANDERSON, R. JAIRATH, L. MOCK; J. A. P. , 67, 3999 (1990).
- (1990) J. A. P. , vol.67 , pp. 3999
- Anderson, H.M.¹ Jairath, R.² Mock, L.³

6
- 21544469810
- L. BOUFENDI, A. PLAIN, J.Ph. BLONDEAU, C. LAURE, A. BOUCHOULE;Appl. Phys Lett. , 60,169
- Appl. Phys Lett. , vol.60 , pp. 169
- Boufendi, L.¹ Plain, A.² Blondeau, J.Ph.³ Laure, C.⁴ Bouchoule, A.⁵

7
- 0001390325
- Ph. BELENGUER, J. Ph. BLONDEAU, L. BOUFENDI; M. TOOGOOD, A. PLAIN, C. LAURE; Phys. Rev. A, 46, 7923
- Phys. Rev. A , vol.46 , pp. 7923
- Belenguer, Ph.¹ Blondeau, J.Ph.² Boufendi, L.³ Toogood, M.⁴ Plain, A.⁵ Laure, C.⁶

8
- 36449008494
- L. BOUFENDI, , A. BOUCHOULE, R. K. PORTEUS, J. Ph. BLONDEAU, A. PLAIN, C. LAURE; J.A.P., 73, 2160
- J.A.P. , vol.73 , pp. 2160
- Boufendi, L.¹ Bouchoule, A.² Porteus, R.K.³ Blondeau, J.Ph.⁴ Plain, A.⁵ Laure, C.⁶

9
- 0028462569
- L. BOUFENDI, J. HERMANN, A. BOUCHOULE, B DUBREUIL, E. &W. STOFFELS, M.L. GIORGI; JAP, 76, 148
- JAP , vol.76 , pp. 148
- Boufendi, L.¹ Hermann, J.² Bouchoule, A.³ Dubreuil, B.⁴ Stoffels, E.⁵ Stoffels, W.⁶ Giorgi, M.L.⁷

10
- 0028256924
- N. HERLIN, M. LUCE, E. MUSSET, M. CAUCHETIER, J. Eur. Ceramic Soc. 13, 285 ,1994
- (1994) J. Eur. Ceramic Soc. , vol.13 , pp. 285
- Herlin, N.¹ Luce, M.² Musset, E.³ Cauchetier, M.⁴

11
- 2542599705
- Amsterdam
- A. A. HOWLING, J. L. DORIER, Ch. HOLLENSTEIN, 12th European Photovoltaic Solar Energy Conference, Amsterdam, 1994, Vol I.
- (1994) 12th European Photovoltaic Solar Energy Conference , vol.1
- Howling, A.A.¹ Dorier, J.L.² Hollenstein, Ch.³

12
- 0027625973
- S. VEPREK, K SCHOPPER, O. AMBACHER, W. RIEGER, M.G.J.VEPREK-HEIJMAN, J. Electrochem. Soc. 140, 1935.
- J. Electrochem. Soc. , vol.140 , pp. 1935
- Veprek, S.¹ Schopper, K.² Ambacher, O.³ Rieger, W.⁴ Veprek-Heijman, M.G.J.⁵

13
- 0001903376
- J. PERRIN, C. BÖHM, R. ETEMADI, A. LLORET, P.S.S.T, 3, 252.
- P.S.S.T , vol.3 , pp. 252
- Perrin, J.¹ Böhm, C.² Etemadi, R.³ Lloret, A.⁴

14
- 0000470286
- S. J. CHOI, M. J. KUSHNER, J. Appl. Phys., 74, 853 (1993).
- (1993) J. Appl. Phys. , vol.74 , pp. 853
- Choi, S.J.¹ Kushner, M.J.²

15
- 0000440170
- P. BELENGUER, and J.P. BOEUF, Phys. Rev. A41, 4447 (1990).
- (1990) Phys. Rev. , vol.A41 , pp. 4447
- Belenguer, P.¹ Boeuf, J.P.²

16
- 2542567705
- Albuquerque, USA, Oct. 91
- Ph. BELENGUER, C. BÖHM, J.P. BOEUF, and J. PERRIN, 44th Gaseous Electronics Conference (GEC 44), Albuquerque, USA, Oct. 91.
- 44th Gaseous Electronics Conference (GEC 44)
- Belenguer, Ph.¹ Böhm, C.² Boeuf, J.P.³ Perrin, J.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.