Particles in silicon deposition discharges

Solar Energy Materials and Solar Cells

Volumn 78, Issue 1-4, 2003, Pages 27-40

  Gallagher, Alan ^a   Bano, Gregory ^a   Rozsa, Karoly ^a  

^a UNIVERSITY OF COLORADO   (United States)

Author keywords

Amorphous silicon; Discharge; Particles; Silane

Indexed keywords

ELECTRIC DISCHARGES; ELECTRODES; PARTICLE SIZE ANALYSIS; PLASMAS; SILANES; THERMOPHORESIS;

RADIO FREQUENCIES (RF);

AMORPHOUS SILICON;

EID: 0038358148     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(02)00432-4     Document Type: Article

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