Hydrogen poor cationic silicon clusters in an expanding argon-hydrogen-silane plasma

Applied Physics Letters

Volumn 72, Issue 19, 1998, Pages 2397-2399

  Kessels, W M M ^a   Van De Sanden, M C M ^a   Schram, D C ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000622101     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121367     Document Type: Article

References (13)

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