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Physica B: Condensed Matter

Volumn 406, Issue 2, 2011, Pages 211-215

FTIR and spectroscopic ellipsometry investigations of the electron beam evaporated silicon oxynitride thin films

(1) Mohamed, S H a,b

a Sohag University (Egypt)

b QASSIM UNIVERSITY (Saudi Arabia)

Author keywords

FTIR; Optical constants; Silicon oxynitride; Spectroscopic ellipsometry

Indexed keywords

ABSORPTION BAND; ABSORPTION COEFFICIENTS; BRUGGEMAN EFFECTIVE MEDIUM APPROXIMATION; CAUCHY MODEL; ELLIPSOMETRIC SPECTRA; EVAPORATED SILICON; EXTINCTION COEFFICIENTS; FTIR; INTERFACE LAYER; SILICON OXYNITRIDE; SPECTROSCOPIC ELLIPSOMETERS; SURFACE LAYERS; THREE-LAYER; URBACH ENERGY;

ABSORPTION; COMPUTER SIMULATION; ELECTRON BEAMS; LIGHT REFRACTION; OPTICAL CONSTANTS; REFRACTIVE INDEX; REFRACTOMETERS; SEMICONDUCTING SILICON COMPOUNDS; SILICON NITRIDE; SPECTROSCOPIC ELLIPSOMETRY; THIN FILMS;

SILICON OXIDES;

EID: 78649522119 PISSN: 09214526 EISSN: None Source Type: Journal
DOI: 10.1016/j.physb.2010.10.045 Document Type: Article

Times cited : (7)

References (33)

1
- 77950594200
- V. Godinho, M.C. Jimnez de Haro, J. Garcia-Lopez, V. Goossens, H. Terryn, M.P. Delplancke-Ogletree, and A. Fernandez Appl. Surf. Sci. 256 2010 4548
- (2010) Appl. Surf. Sci. , vol.256 , pp. 4548
- Godinho, V.¹ Jimnez De Haro, M.C.² Garcia-Lopez, J.³ Goossens, V.⁴ Terryn, H.⁵ Delplancke-Ogletree, M.P.⁶ Fernandez, A.⁷

2
- 0032206886
- R.M. de Ridder, K. Worhoff, A. Driessen, P.V. Lambeck, and H. Albers IEEE J. Select. Topics Quantum Electron 4 1998 930
- (1998) IEEE J. Select. Topics Quantum Electron , vol.4 , pp. 930
- De Ridder, R.M.¹ Worhoff, K.² Driessen, A.³ Lambeck, P.V.⁴ Albers, H.⁵

3
- 0001486714
- A. Borghesi, E. Bellandi, G. Guizzetti, A. Sassella, S. Rojas, and L. Zanotti Appl. Phys. A 56 1993 147
- (1993) Appl. Phys. A , vol.56 , pp. 147
- Borghesi, A.¹ Bellandi, E.² Guizzetti, G.³ Sassella, A.⁴ Rojas, S.⁵ Zanotti, L.⁶

4
- 0026821985
- Y. Cros, N. Jaffrezic-Renault, J.M. Chevelon, and J.J. Fombon J. Electrochem. Soc. 139 1992 507
- (1992) J. Electrochem. Soc. , vol.139 , pp. 507
- Cros, Y.¹ Jaffrezic-Renault, N.² Chevelon, J.M.³ Fombon, J.J.⁴

5
- 0000150825
- T.S. Eriksson, and C.G. Granqvist J. Appl. Phys. 60 1986 2081
- (1986) J. Appl. Phys. , vol.60 , pp. 2081
- Eriksson, T.S.¹ Granqvist, C.G.²

6
- 0037463268
- M. Ribeiro, I. Pereyra, and M.I. Alayo Thin Solid Films 426 2003 200
- (2003) Thin Solid Films , vol.426 , pp. 200
- Ribeiro, M.¹ Pereyra, I.² Alayo, M.I.³

7
- 67651121681
- Chi-Yu Wang, Jin-Cheng Hsu, and Hung-Pin Shiao Solid-State Electron. 53 2009 940
- (2009) Solid-State Electron. , vol.53 , pp. 940
- Wang, C.-Y.¹ Hsu, J.-C.² Shiao, H.-P.³

8
- 0036565352
- E. Desbiens, R. Dolbec, and M.A. El Khakani J. Vac. Technol. A 20 2002 1157
- (2002) J. Vac. Technol. A , vol.20 , pp. 1157
- Desbiens, E.¹ Dolbec, R.² El Khakani, M.A.³

9
- 77954957690
- D. Yonekura, K. Fujikawa, and R. Murakami Surf. Coat. Technol. 205 2010 168
- (2010) Surf. Coat. Technol. , vol.205 , pp. 168
- Yonekura, D.¹ Fujikawa, K.² Murakami, R.³

10
- 0036686669
- K. Worhoff, L.T.H. Hilderink, A. Driessen, and P.V. Lambeck J. Electrochem. Soc. 149 2002 F85
- (2002) J. Electrochem. Soc. , vol.149 , pp. 85
- Worhoff, K.¹ Hilderink, L.T.H.² Driessen, A.³ Lambeck, P.V.⁴

11
- 21144481440
- P.G. Snyder, Y.-M.J.A. Woollam, G.A. Al.-Jumaily, F.J. Gagliardi, and F.J. Gaglirdi J. Vac. Sci. Technol. A 10 1992 1462
- (1992) J. Vac. Sci. Technol. A , vol.10 , pp. 1462
- Snyder, P.G.¹ Woollam, Y.-M.J.A.² Al.-Jumaily, G.A.³ Gagliardi, F.J.⁴ Gaglirdi, F.J.⁵

12
- 0033225434
- C.S. Mian, and I.S.-Y. Flora Solid State Electron. 43 1999 1997
- (1999) Solid State Electron. , vol.43 , pp. 1997
- Mian, C.S.¹ Flora, I.S.-Y.²

13
- 0032680398
- D.A. Buchanan IBM J. Res. Dev. 43 1999 245
- (1999) IBM J. Res. Dev. , vol.43 , pp. 245
- Buchanan, D.A.¹

14
- 44249123820
- J. Shim, H.G. Yoon, S.-H. Na, I. Kim, and S. Kwak Surf. Coat. Technol. 202 2008 2844
- (2008) Surf. Coat. Technol. , vol.202 , pp. 2844
- Shim, J.¹ Yoon, H.G.² Na, S.-H.³ Kim, I.⁴ Kwak, S.⁵

15
- 31144458858
- E.C. Samano, J. Camacho, and Machorro J. Vac. Sci. Technol. A 23 2005 1228
- (2005) J. Vac. Sci. Technol. A , vol.23 , pp. 1228
- Samano, E.C.¹ Camacho, J.² Machorro³

16
- 28044458141
- A. Szekeres, T. Nikolova, S. Simeonov, A. Gushterov, F. Hamelmann, and U. Heinzmann Microelectron. J. 37 2006 64
- (2006) Microelectron. J. , vol.37 , pp. 64
- Szekeres, A.¹ Nikolova, T.² Simeonov, S.³ Gushterov, A.⁴ Hamelmann, F.⁵ Heinzmann, U.⁶

17
- 3142657895
- M. Klanisek Gunde, and M. Macek Phys. Status Solidi A: Appl. Res. 183 2001 439
- (2001) Phys. Status Solidi A: Appl. Res. , vol.183 , pp. 439
- Klanisek Gunde, M.¹ MacEk, M.²

18
- 33846990968
- F. Rebib, E. Tomasella, M. Dubois, J. Cellier, T. Sauvage, and M. Jacquet Thin Solid Films 515 2007 3480
- (2007) Thin Solid Films , vol.515 , pp. 3480
- Rebib, F.¹ Tomasella, E.² Dubois, M.³ Cellier, J.⁴ Sauvage, T.⁵ Jacquet, M.⁶

19
- 0000096595
- C.M. Herzinger, B. Johs, W.A. McGahan, J.A. Woollam, and W. Paulson J. Appl. Phys. 83 1998 3323
- (1998) J. Appl. Phys. , vol.83 , pp. 3323
- Herzinger, C.M.¹ Johs, B.² McGahan, W.A.³ Woollam, J.A.⁴ Paulson, W.⁵

20
- 78649515267
- Academic Press Boston
- H.G. Tompkins, and A. User's Guide to Ellipsometry 1991 Academic Press Boston
- (1991) Guide to Ellipsometry
- Tompkins, H.G.¹ User'S, A.²

21
- 78649516548
- Institute of Physics Bristol
- L. Ward "Effect Medium Theory", in the Optical Constants of Bulk Materials and Thin Films 1992 Institute of Physics Bristol Section 8.3, p. 246
- (1992) "effect Medium Theory", in the Optical Constants of Bulk Materials and Thin Films
- Ward, L.¹

22
- 0001524926
- G.E. Jellison, and F.A. Modine Appl. Phys. Lett. 69 1996 2137 [Erratum]
- (1996) Appl. Phys. Lett. , vol.69 , pp. 2137
- Jellison, G.E.¹ Modine, F.A.²

23
- 0001524926
- G.E. Jellison, and F.A. Modine Appl. Phys. Lett. 69 1996 371
- (1996) Appl. Phys. Lett. , vol.69 , pp. 371
- Jellison, G.E.¹ Modine, F.A.²

24
- 0039436914
- M.L. Green, E.P. Gusev, R. Degraeve, and E.L. Garfunkel J. Appl. Phys. 90 2001 2057
- (2001) J. Appl. Phys. , vol.90 , pp. 2057
- Green, M.L.¹ Gusev, E.P.² Degraeve, R.³ Garfunkel, E.L.⁴

25
- 57249094313
- F. Rebib, E. Tomasella, V. Micheli, C. Eypert, J. Cellier, and N. Laidani Opt. Mater. 31 2009 510
- (2009) Opt. Mater. , vol.31 , pp. 510
- Rebib, F.¹ Tomasella, E.² Micheli, V.³ Eypert, C.⁴ Cellier, J.⁵ Laidani, N.⁶

26
- 43049139193
- P. Prathap, N. Revathi, Y.P. Venkata Subbaiah, and K.T. Ramakrishna Reddy J. Phys.: Condens. Matter 20 2008 035205
- (2008) J. Phys.: Condens. Matter , vol.20 , pp. 035205
- Prathap, P.¹ Revathi, N.² Venkata Subbaiah, Y.P.³ Ramakrishna Reddy, K.T.⁴

27
- 0004150815
- K. Tanaka, E. Maruyama, T. Shimada, H. Okamoto, T. Sato, John Wiley & Sons Ltd Chichester
- K. Tanaka, E. Maruyama, T. Shimada, H. Okamoto, T. Sato, Amorphous Silicon 1999 John Wiley & Sons Ltd Chichester
- (1999) Amorphous Silicon

28
- 84985574466
- J. Tauc, R. Grigorov, and A. Vancu Phys. Status Solidi 15 1966 627
- (1966) Phys. Status Solidi , vol.15 , pp. 627
- Tauc, J.¹ Grigorov, R.² Vancu, A.³

29
- 0003584285
- Clarendon Press Oxford
- N.F. Mott, and E.A. Davis Electronic Processes in Noncrystalline Materials 1979 Clarendon Press Oxford p. 273
- (1979) Electronic Processes in Noncrystalline Materials
- Mott, N.F.¹ Davis, E.A.²

30
- 4243136628
- T.S. Moss Proc. Phys. Soc. B 63 1950 167
- (1950) Proc. Phys. Soc. B , vol.63 , pp. 167
- Moss, T.S.¹

31
- 40849146878
- S. Kohli, J.A. Theil, P.R. McCurdy, P.C. Dippo, R.K. Ahrenkiel, C.D. Rithner, and P.K. Dorhout Thin Solid Films 516 2008 4342
- (2008) Thin Solid Films , vol.516 , pp. 4342
- Kohli, S.¹ Theil, J.A.² McCurdy, P.R.³ Dippo, P.C.⁴ Ahrenkiel, R.K.⁵ Rithner, C.D.⁶ Dorhout, P.K.⁷

32
- 0035361626
- M. Modreanu, M. Gartner, N. Tomozeiu, J. Seekamp, and P. Cosmin Opt. Mater. 17 2001 145
- (2001) Opt. Mater. , vol.17 , pp. 145
- Modreanu, M.¹ Gartner, M.² Tomozeiu, N.³ Seekamp, J.⁴ Cosmin, P.⁵

33
- 0001360490
- V. Srikant, and D.R. Clarke J. Appl. Phys. 81 1997 6357
- (1997) J. Appl. Phys. , vol.81 , pp. 6357
- Srikant, V.¹ Clarke, D.R.²

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