Silicon oxynitride planar waveguiding structures for application in optical communication

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 4, Issue 6, 1998, Pages 930-937

  De Ridder, René M ^a,b   Wörhoff, Kerstin ^b   Driessen, Alfred ^a,b   Lambeck, Paul V ^b   Albers, Hans ^b  

^a IEEE   (Netherlands)

^b UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Birefringence; CVD; Electrooptic modulation; Nonlinear optics; Optical communication; Optical device fabrication; Optical planar waveguides; Optical polymers; Silicon ploymers; Thermooptic effects; Tunable filters

Indexed keywords

BIREFRINGENCE; CHEMICAL VAPOR DEPOSITION; ELECTROOPTICAL EFFECTS; INTEGRATED OPTICS; LIGHT POLARIZATION; NONLINEAR OPTICS; OPTICAL COMMUNICATION; OPTICAL FILTERS; POLYMERS; REFRACTIVE INDEX; SECOND HARMONIC GENERATION; SILICON NITRIDE;

ELECTROOPTIC MODULATION; OPTICAL POLYMERS; SILICON OXYNITRIDE; THERMOOPTIC EFFECTS;

OPTICAL WAVEGUIDES;

EID: 0032206886     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/2944.736079     Document Type: Article

References (30)

1. A. Himeno, T. Kominato, M. Kawachi, and K. Okamoto, "System applications of large-scale optical switch matrices using silica-based planar lightwave circuits," in Photonic Networks - Advances in Optical Communications. Berlin, Germany: Springer, 1997, pp. 172-182.
2. M. Kawachi, "Silica waveguides on silicon and their application to integrated-optic components," Opt. Quantum Electron., vol. 22, pp. 391-416, 1990.
3. 2-doped silica waveguides," Electron. Lett., vol. 28, pp. 1863-1864, 1992.
4. 3," Appl. Phys. Lett., vol. 41, pp. 607-608, 1982.
5. K. Kawano, M. Kohtoku, M. Wada, H. Okamoto, Y. Itaya, and M. Naganuma, "Design of a spotsize-converter-integrated laser diode (SS-LD) with a lateral taper, thin-film core and ridge in the 1.3-μm-wavelength region based on the 3D BPM," IEEE J. Select. Topics Quantum Electron., vol. 2, pp. 348-354, 1996.
6. S. Valette, J. P. Jadot, P. Gidon, S. Renard, A. Fournier, A. M. Grouillet, H. Denis, P. Philippe, and E. Desgranges, "Si-based integrated optics technologies," Solid State Technol., vol. 32, no. 2, pp. 69-75, 1989.
7. M. Hoffmann, P. Kopka, and E. Voges, "Low-loss fiber-matched low-temperature PECVD waveguides with small-core dimensions for optical communication systems," IEEE Photon. Technol. Lett., vol. 9, pp. 1238-1240, 1997.
8. M. Hoffmann, P. Kopka, and E. Voges, "Thermo-optical digital switch arrays in silica-on-silicon with defined zero-voltage state," J. Lightwave Technol., vol. 16, pp. 395-400, 1998.
9. W. Gleine and J. Müller, "Laser trimming of SiON components for integrated optics," J. Lightwave Technol., vol. 9, pp. 1626-1629, 1991.
10. B. J. Offrein, G. L. Bona, R. Germann, F. Krommendijk, I. Massarek, and H. W. M. Salemink, "High contrast and low loss SiON optical waveguides by PECVD," in Proc. IEEE/LEOS Symp. Benelux Chapter, 1996, pp. 290-293.
11. M. Svalgaard and M. Kristensen, "Directly UV written silica-on-silicon planar waveguides with low loss," Electron. Lett., vol. 33, pp. 861-863, 1997.
12. R. M. de Ridder, R. A. Wijbrans, H. Albers, J. S. Aukema, P. V. Lambeck, H. J. W. M. Hoekstra, and A. Driessen, "A spot-size transformer for fiber-chip coupling in sensor applications at 633 nm in silicon oxynitride," in Proc. LEOS'95 Conf., San Francisco, CA, 1995, vol. 2, pp. 86-87.
13. R. G. Heideman and P. V. Lambeck, "Simple and reusable fiber-to-chip interconnect with adjustable coupling efficiency," Proc. SPIE, vol. 3099, pp. 238-247, 1997.
14. K. Beniaissa, A. Nathan, S. T. Chu, and W. Huang, "IC compatible optical coupling techniques for integration of arrow with photodetector," J. Lightwave Technol., vol. 16, pp. 1423-1432, 1998.
15. A. Driessen, H. J. W. M. Hoekstra, F. Horst, G. J. M. Krijnen, B. J. Offrein, J. B. P. van Schoot, P. V. Lambeck, and Th. J. A. Popma, "All-optical integrated optic devices: A hybrid approach," Proc. Inst. Elect. Eng.-Optoelectron., 1998, vol. 145, pp. 227-235.
16. H. Albers, L. T. H. Hilderink, J. H. Berends, K. Wörhoff, N. F. van Hulst, and P. V. Lambeck, "A waveguide material for integrated optical sensors: silicon oxynitride," in Proc. 1996 Nat. Sensor Conf., Delft, The Netherlands, 1996, pp. 221-230.
17. K. Wörhoff, P. V. Lambeck, H. Albers, O. F. J. Noordman, N. F. van Hulst, and Th. J. A. Popma, "Optimization of LPCVD silicon oxynitride growth to large refractive index homogeneity and layer thickness uniformity," Proc. SPIE, vol. 3099, pp. 257-268, 1997.
18. K. Wörhoff, A. Driessen, P. V. Lambeck, L. T. H. Hilderink, P. W. C. Linders, and Th. J. A. Popma, "PECVD Silicon oxynitride optimized for application in integrated optics," Sensors and Actuators A, to be published.
19. y optical waveguides in the near infrared," in Proc. IEEE LEOS'95, San Francisco, CA, 1995, pp. 88-89.
20. K. Wörhoff, B. J. Offrein, A. Driessen, P. V. Lambeck, G. L. Bona, and Th. J. A. Popma, "Birefringence compensation in double-core optical waveguides," in ECOC'98, Madrid, Spain, 1998, vol. 1, pp. 605-606.
21. M. K. Smit, E. C. M. Pennings, and H. Blok, "A normalized approach to the design of low-loss optical waveguide bends," J. Lightwave Technol., vol. 11, pp. 1737-1742, 1993.
22. Th. Feuchtner, "Active and passive optical waveguides by plasma enhanced chemical vapor deposition," Ph.D. dissertation, Technical Univ. of Denmark, 1996.
23. M. K. Smit and C. van Dam, "PHASAR-based WDM-devices: Principles, design and applications," IEEE J. Select. Topics Quantum Electron., vol. 2, pp. 236-250, 1996.
24. 2 waveguides on Si," J. Lightwave Technol., vol. 6, pp. 1011-1015, 1988.
25. B. H. Sikken, R. M. de Ridder, K. Wörhoff, G. J. M. Krijnen, R. G. Heideman, and A. Driessen, "Tuneable WDM add-drop multiplexer using cascaded Mach-Zehnder wavelength filters," in Proc. IEEE/LEOS Symp. Benelux Chapter, 1997, pp. 37-40.
26. F. C. Blom, D. R. van Dijk, H. J. W. M. Hoekstra, A. Driessen, and Th. J. A. Popma, "Experimental study of integrated-optics microcavity resonators: Toward an all-optical switching device," Appl. Phys. Lett., vol. 71, pp. 747-749, 1997.
27. A. Driessen, H. M. M. Klein Koerkamp, and Th. J. A. Popma, "Novel integrated optic intensity modulator based on mode coupling," Fiber Integrated Opt., vol. 13, pp. 445-461, 1994.
28. R. M. de Ridder, A. F. M. Sander, A. Driessen, and J. H. J. Fluitman, "An integrated optic adiabatic TE/TM mode splitter on silicon," J. Lightwave Technol., vol. 11, pp. 1806-1811, 1993.
29. K. Wörhoff, O. F. J. Noordman, H, Albers, P. V. Lambeck, and N. F. van Hulst, "Noncritically phase-matched second harmonic generation of blue light in Si[O]N-calix[4]arene slab type waveguides," Opt. Commun., vol. 124, pp. 493-499, 1996.
30. A. Driessen, H. J. W. M Hoekstra, F. C. Blom, F. Horst, G. J. M. Krijnen, J. B. P. van Schoot, P. V. Lambeck, Th. J. A. Popma, and M. B. Diemeer, "Evaluation of polymer based third order nonlinear integrated optics devices," Opt. Mater., vol. 9, pp. 329-333, 1998.