An experimental analysis of electrostatically vibrated array of polysilicon cantilevers

Microsystem Technologies

Volumn 16, Issue 12, 2010, Pages 2131-2145

  Chakraborty, S ^a   Swamy, K B M ^a   Sen, S ^a   Bhattacharyya, T K ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL APPROACH; DAMPING MECHANISMS; ELECTROSTATIC ACTUATION; EXPERIMENTAL ANALYSIS; EXPERIMENTAL APPROACHES; EXPERIMENTAL VALUES; FINITE ELEMENT METHOD BASED SIMULATION; LASER DOPPLER VIBROMETERS; MEMSDEVICES; MICRO-CANTILEVERS; MICRO-MECHANICAL; MICROELECTROMECHANICAL SYSTEMS; MICROMECHANICAL CANTILEVERS; MICROMECHANICAL STRUCTURES; QUALITY FACTORS; SEMI-ANALYTICAL; SURFACE MICROMACHINING PROCESS; THEORETICAL ESTIMATION; VIBRATION CHARACTERISTICS;

BEHAVIORAL RESEARCH; DAMPING; DYNAMIC RESPONSE; DYNAMICS; ELECTROSTATIC ACTUATORS; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NANOCANTILEVERS; POLYSILICON;

VIBRATION ANALYSIS;

EID: 78049483783     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-010-1148-z     Document Type: Article

References (43)

1. Alsaleem FM, Yunis MI, Ouakad HM (2009) On the nonlinear resonance and dynamic pull-in of electrostatically actuated resonators. J Microeng Microeng 19(4):045013-045013-14
2. Azizi A, Durali L, Rad FP, Zareie S (2009) Mathematical modeling of deflection of a beam: A finite element approach. In: 2nd International Conference on Environmental and Computer Science, Dubai, December 2009. IEEE, pp 161-164
3. Bao M (2005) Analysis and design principles of MEMS devices. Elsevier, Amsterdam
4. FR Blom S Bouwstra M Elwenspoek JHJ Fluitman 1992 Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry J Vac Sci Technol B 10 1 19 26 10.1116/1.586300
5. Chakraborty S, Bhattacharyya TK (2010) Development of MEMS based universal gate for signal processing circuit in low frequency sensor applications. In: IEEE Students Technology Symposium TechSym'10. Kharagpur, April 2010. IEEE, pp 129-136
6. S Chowdhury M Ahmadi WC Miller 2005 A closed-form model for the pull-in voltage of electrostatically actuated cantilever beams J Micromech Microeng 15 4 756 763 10.1088/0960-1317/15/4/012
7. AN Cleland ML Roukes 2002 Noise processes in nanomechanical resonators J Appl Phys 92 5 2758 2769 10.1063/1.1499745
8. Coventor, Inc. (2008) MEMS design and analysis tutorials, vol 1 (March 2008)
9. AA Geisberger N Sarkar M Ellis GD Skidmore 2003 Electrothermal properties and modeling of polysilicon microthermal actuators J Microelectromech Syst 12 4 513 523 10.1109/JMEMS.2003.815835
10. Z Hao A Erbil F Ayazi 2003 An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations Sens Actuators A 109 1-2 156 164
11. H Hosaka K Itao S Kuroda 1995 Damping characteristics of beam-shaped micro-oscillators Sens Actuators A 49 1-2 87 95
12. T Ikehara J Lu M Konno R Maeda T Mihara 2007 A high quality factor silicon cantilever for a low detection-limit resonant mass sensor operated in air J Micromech Microeng 17 12 2491 2494 10.1088/0960-1317/17/12/015
13. Judge JA, Photiadis DM, Vignola JF, Houston BH, Jarynski J (2007) Attachment loss of micromechanical and nanomechanical resonators in the limits of thick and thin structures. J Appl Phys 101(1):013521-013521-11
14. SMM Kafumbe JS Burdess AJ Harris 2005 Frequency adjustment of microelectromechanical cantilevers using electrostatic pull down J Microeng Microeng 15 5 1033 1039 10.1088/0960-1317/15/5/020
15. WP King TW Kenny KE Goodson GLW Cross M Despont UT Durig H Rothuizen G Binnig P Vettiger 2002 Design of atomic force microscope cantilevers for combined thermomechanical writing and thermal reading in array operation J Microelectromech Syst 11 6 765 774 10.1109/JMEMS.2002.803283
16. Koester D, Cowen A, Mahadevan R, Stonefield M, Hardy B (2003) MEMSCAP PolyMUMPs design handbook, Revision 10.0
17. PY Kwok MS Weinberg BS Breuer 2005 Fluid effects in vibrating micromachined structures J Microelectromech Syst 14 4 770 781 10.1109/JMEMS.2005.845425
18. I Ladabaum X Jin HT Soh A Atalar BT Khuri-Yakub 1998 Surface micromachined capacitive ultrasonic transducers IEEE Trans Ultraon Freq Cont 45 3 678 690 10.1109/58.677612
19. R Liftshitz ML Roukes 2000 Thermoelastic damping in micro and nanomechanical systems Phys Rev B 61 8 5600 5609 10.1103/PhysRevB.61.5600
20. Ma C-C, Chuang K-C (2008) Investigation of the transient behavior of a cantilever using a point-wise fiber Bragg grating displacement sensor system. Smart Mater Struct 17(6):065010-065010-11
21. AW Mcfarland MA Poggi LA Bottomley JS Colton 2005 Characterization of microcantilevers solely by frequency response acquisition J Microeng Microeng 15 4 785 791 10.1088/0960-1317/15/4/016
22. SS Mohite VR Sonti R Pratap 2007 A compact squeeze-film model influencing inertia, compressibility, and rarefaction effects for perforated 3-D MEMS structures J Microelectromech Syst 16 4 709 723
23. Naeli K, Brand O (2009) Dimensional consideration in achieving large quality factors for resonant silicon cantilevers in air. J Appl Phys 105(1):014908-014908-10
24. Ocakli HI, Ozturk A, Ozber N, Kavakli H, Alaca E, Urey H (2008) Resonant cantilever bio sensor with integrated grating readout. In: International Conference on Optical MEMS and Nanophotonics. Freiburg, August 2008 IEEE/LEOS, pp 46-47
25. Onaran AG, Degertekin FL, Hadimioglu B, Sulchek T, Quate CF (2002) Actuation of atomic force microscope cantilevers in fluids using acoustic radiation pressure. In: 15th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, NV, USA, January 2002. IEEE, pp 356-359
26. Pandey AK (2007) Analytical, numerical and experimental studies of fluid damping in MEMS devices, (PhD), Indian Institute of Science, Bangalore, India
27. AK Pandey R Pratap 2007 Effect of flexural modes on squeeze film damping in MEMS cantilever resonators J Micromech Microeng 17 12 2475 2484 10.1088/0960-1317/17/12/013
28. AK Pandey R Pratap FS Chau 2008 Influence of boundary conditions on the dynamic characteristics of squeeze films in MEMS devices J Microelectromech Syst 17 3 893 903
29. Rebeiz GM (2003) RF MEMS: theory, design and technology. Wiley, Hoboken
30. L Rodríguez-Pardo JF Rodríguez CC Gabrielli H Perrot R Brendel 2005 Sensitivity, noise, and resolution in QCM sensors in liquid media IEEE Sens J 5 6 1251 1257 10.1109/JSEN.2005.859257
31. Roszhart TV (1990) The effect of thermoelastic internal friction on the Q of Micromachined silicon resonators. In: Solid-state sensor and actuator workshop, 1990. 4th Technical digest, Hilton Head Island, SC, USA, IEEE, pp 13-16
32. FJ Rubio-Sierra R Vazquez RW Stark 2006 Transfer function analysis of the micro cantilever used in atomic force microscopy IEEE Trans Nanotechnol 5 6 692 700 10.1109/TNANO.2006.883479
33. Salehi-Khojin A, Bashash S, Jalili N (2008) Modeling and experimental vibration analysis of nanomechanical cantilever active probes. J Microeng Microeng 18(8):085008-085008-11
34. Tzes AP, Yurkovich S, Langer FD (1989) A method for solution of the Euler-Bernoulli Beam equation in flexible-link robotic systems. In: IEEE International Conference on Systems Engineering, Fairborn, OH, August 1989, IEEE, pp 557-560
35. T Wakayama T Kobayashi N Iwata N Tanifuji Y Matsuda S Yamada 2006 Micro-fabrication of silicon/ceramic hybrid cantilever for atomic force microscope and sensor applications Sens Actuators A Phys 126 1 159 164 10.1016/j.sna.2005.05.005
36. Wischke M, Masur M, Goldschmidtboeing F, Woias P (2009) Resonance tunability of clamped-free piezoelectric cantilevers. J Microeng Microeng 19(12):125020-125020-8
37. Xu Y, Lin J-T, Alphenaar BW, Keynton RS (2006) Viscous damping of microresonators for gas composition analysis. Appl Phys Lett 88(14):143513-143513-3
38. J Yang T Ono M Esashi 2002 Energy dissipation in submicrometer thick single-crystal silicon cantilevers J Microelectromech Syst 11 6 775 783 10.1109/JMEMS.2002.805208
39. Z Yapu 2003 Stiction and anti-stiction in MEMS and NEMS Acta Mech Sin 19 1 1 10 10.1007/BF02487448
40. KY Yasumura TD Stowe EM Chow T Pfafman TW Kenny BC Stipe D Rugar 2000 Quality factor in micron- and submicron-thick cantilevers J Microelectromech Syst 9 1 117 125 10.1109/84.825786
41. C Zener 1937 Internal friction in solids I: theory of internal friction in reeds Phys Rev 52 3 230 235 10.1103/PhysRev.52.230
42. C Zener 1938 Internal friction in solids II: general theory of thermoelastic internal friction Phys Rev 53 1 90 99 10.1103/PhysRev.53.90
43. C Zener W Otis R Nuckolss 1938 Internal friction in solids III: experimental demonstration of thermoelastic internal friction Phys Rev 53 1 100 101 10.1103/PhysRev.53.100